Invention Grant
- Patent Title: Process for the collective fabrication of 3D electronic modules
- Patent Title (中): 三维电子模块集体制作的过程
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Application No.: US12158125Application Date: 2006-12-19
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Publication No.: US07877874B2Publication Date: 2011-02-01
- Inventor: Christian Val
- Applicant: Christian Val
- Applicant Address: FR
- Assignee: 3D Plus
- Current Assignee: 3D Plus
- Current Assignee Address: FR
- Agency: Lowe Hauptman Ham & Berner, LLP
- Priority: FR0513217 20051223
- International Application: PCT/EP2006/069948 WO 20061219
- International Announcement: WO2007/071696 WO 20070628
- Main IPC: H01K3/10
- IPC: H01K3/10

Abstract:
The invention relates to the collective fabrication of n 3D modules. A batch of n wafers I are fabricated on one and the same plate. This step is repeated K times. The K plates are stacked. Plated-through holes are formed in the thickness of the stack. These holes are intended for connecting the slices together. The stack is cut in order to obtain the n 3D modules. The plate 10, which comprises silicon, is covered on one face 11 with an electrically insulating layer forming the insulating substrate. This face has grooves 20 that define n geometrical features, which are provided with an electronic component 1 connected to electrical connection pads 2′ placed on said face.
Public/Granted literature
- US20080289174A1 Process for the Collective Fabrication of 3D Electronic Modules Public/Granted day:2008-11-27
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