Invention Grant
US07877874B2 Process for the collective fabrication of 3D electronic modules 有权
三维电子模块集体制作的过程

  • Patent Title: Process for the collective fabrication of 3D electronic modules
  • Patent Title (中): 三维电子模块集体制作的过程
  • Application No.: US12158125
    Application Date: 2006-12-19
  • Publication No.: US07877874B2
    Publication Date: 2011-02-01
  • Inventor: Christian Val
  • Applicant: Christian Val
  • Applicant Address: FR
  • Assignee: 3D Plus
  • Current Assignee: 3D Plus
  • Current Assignee Address: FR
  • Agency: Lowe Hauptman Ham & Berner, LLP
  • Priority: FR0513217 20051223
  • International Application: PCT/EP2006/069948 WO 20061219
  • International Announcement: WO2007/071696 WO 20070628
  • Main IPC: H01K3/10
  • IPC: H01K3/10
Process for the collective fabrication of 3D electronic modules
Abstract:
The invention relates to the collective fabrication of n 3D modules. A batch of n wafers I are fabricated on one and the same plate. This step is repeated K times. The K plates are stacked. Plated-through holes are formed in the thickness of the stack. These holes are intended for connecting the slices together. The stack is cut in order to obtain the n 3D modules. The plate 10, which comprises silicon, is covered on one face 11 with an electrically insulating layer forming the insulating substrate. This face has grooves 20 that define n geometrical features, which are provided with an electronic component 1 connected to electrical connection pads 2′ placed on said face.
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