Invention Grant
- Patent Title: Method for amending layout patterns
- Patent Title (中): 修改布局模式的方法
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Application No.: US12127801Application Date: 2008-05-27
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Publication No.: US07886254B2Publication Date: 2011-02-08
- Inventor: Chia-Wei Huang , Te-Hung Wu , Pei-Ru Tsai , Ping-I Hsieh
- Applicant: Chia-Wei Huang , Te-Hung Wu , Pei-Ru Tsai , Ping-I Hsieh
- Applicant Address: TW Science-Based Industrial Park, Hsin-Chu
- Assignee: United Microelectronics Corp.
- Current Assignee: United Microelectronics Corp.
- Current Assignee Address: TW Science-Based Industrial Park, Hsin-Chu
- Agent Winston Hsu; Scott Margo
- Main IPC: G06F17/50
- IPC: G06F17/50

Abstract:
A method for amending layout patterns is disclosed. First, a layout pattern after an optical proximity correction is provided, which is called an amended pattern. Later, a positive sizing procedure and a negative sizing procedure are respectively performed on the amended pattern to respectively obtain a positive sizing pattern and a negative sizing pattern. Then, the positive sizing pattern and the negative sizing pattern are respectively verified to know whether they are useable. Afterwards, the useable positive sizing pattern and the negative sizing pattern are output for the manufacture of a reticle when they are verified to be useable.
Public/Granted literature
- US20090300576A1 METHOD FOR AMENDING LAYOUT PATTERNS Public/Granted day:2009-12-03
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