Invention Grant
US07886601B2 Microelectromechanical sensor having multiple full-scale and sensitivity values
有权
具有多个满量程和灵敏度值的微机电传感器
- Patent Title: Microelectromechanical sensor having multiple full-scale and sensitivity values
- Patent Title (中): 具有多个满量程和灵敏度值的微机电传感器
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Application No.: US11978056Application Date: 2007-10-26
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Publication No.: US07886601B2Publication Date: 2011-02-15
- Inventor: Angelo Merassi , Sarah Zerbini , Hubert Geitner , Marco Del Sarto
- Applicant: Angelo Merassi , Sarah Zerbini , Hubert Geitner , Marco Del Sarto
- Applicant Address: IT Agrate Brianza
- Assignee: STMicroelectronics S.R.L.
- Current Assignee: STMicroelectronics S.R.L.
- Current Assignee Address: IT Agrate Brianza
- Agency: Seed IP Law Group PLLC
- Agent Lisa K. Jorgenson; Karl L. Klassen
- Priority: ITTO2006A0774 20061027
- Main IPC: G01P15/125
- IPC: G01P15/125
Abstract:
A microelectromechanical sensing structure is provided with a mobile element adapted to be displaced as a function of a quantity to be detected, and first fixed elements, capacitively coupled to the mobile element and configured to implement with the mobile element first detection conditions. The sensing structure is further provided with second fixed elements, capacitively coupled to the mobile element and configured to implement with the mobile element second detection conditions, which are different from the first detection conditions. In particular, the first and second detection conditions differ with respect to a full-scale or a sensitivity value in the detection of the aforesaid quantity.
Public/Granted literature
- US20080098815A1 Microelectromechanical sensor having multiple full-scale and sensitivity values Public/Granted day:2008-05-01
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