公开(公告)号：US07886601B2

公开(公告)日：2011-02-15

申请号：US11978056

申请日：2007-10-26

Applicant: Angelo Merassi ,  Sarah Zerbini ,  Hubert Geitner ,  Marco Del Sarto

Inventor： Angelo Merassi ,  Sarah Zerbini ,  Hubert Geitner ,  Marco Del Sarto

IPC: G01P15/125

CPC classification number: G01P15/125 ,  G01P1/023 ,  G01P15/0891 ,  G01P2015/0814 ,  G01P2015/082 ,  G01P2015/0831

Abstract: A microelectromechanical sensing structure is provided with a mobile element adapted to be displaced as a function of a quantity to be detected, and first fixed elements, capacitively coupled to the mobile element and configured to implement with the mobile element first detection conditions. The sensing structure is further provided with second fixed elements, capacitively coupled to the mobile element and configured to implement with the mobile element second detection conditions, which are different from the first detection conditions. In particular, the first and second detection conditions differ with respect to a full-scale or a sensitivity value in the detection of the aforesaid quantity.

Abstract translation: 微机电感测结构设置有适于根据要检测的量移位的移动元件以及电容耦合到移动元件并被配置为利用移动元件实现第一检测条件的第一固定元件。 感测结构还设置有电容耦合到移动元件的第二固定元件，并被配置为与第一检测条件不同的移动元件第二检测条件实现。 特别地，第一和第二检测条件相对于检测上述量的满量程或灵敏度值而不同。

公开(公告)号：US20080098815A1

公开(公告)日：2008-05-01

申请号：US11978056

申请日：2007-10-26

Applicant: Angelo Merassi ,  Sarah Zerbini ,  Hubert Geitner ,  Marco Del Sarto

Inventor： Angelo Merassi ,  Sarah Zerbini ,  Hubert Geitner ,  Marco Del Sarto

IPC: G01P15/13

CPC classification number: G01P15/125 ,  G01P1/023 ,  G01P15/0891 ,  G01P2015/0814 ,  G01P2015/082 ,  G01P2015/0831

Abstract: A microelectromechanical sensing structure is provided with a mobile element adapted to be displaced as a function of a quantity to be detected, and first fixed elements, capacitively coupled to the mobile element and configured to implement with the mobile element first detection conditions. The sensing structure is further provided with second fixed elements, capacitively coupled to the mobile element and configured to implement with the mobile element second detection conditions, which are different from the first detection conditions. In particular, the first and second detection conditions differ with respect to a full-scale or a sensitivity value in the detection of the aforesaid quantity.

Abstract translation: 微机电感测结构设置有适于根据要检测的量移位的移动元件以及电容耦合到移动元件并被配置为利用移动元件实现第一检测条件的第一固定元件。 感测结构还设置有电容耦合到移动元件的第二固定元件，并被配置为与第一检测条件不同的移动元件第二检测条件实现。 特别地，第一和第二检测条件相对于检测上述量的满量程或灵敏度值而不同。