Invention Grant
US07895968B2 Liquid droplet ejection apparatus, method for forming structure, and method for manufacturing electro-optic device 失效
液滴喷射装置,用于形成结构的方法和用于制造电光装置的方法

Liquid droplet ejection apparatus, method for forming structure, and method for manufacturing electro-optic device
Abstract:
A liquid droplet ejection apparatus includes: a liquid droplet ejection portion that ejects a liquid droplet containing a structure forming material onto a substrate; and drying means that dries the droplet on the substrate, thereby forming a structure made of the structure forming material. The drying means includes an energy outputting section that outputs energy onto the droplet on the substrate, thereby causing the structure forming material in the droplet to flow; and an energy profile controlling section controlling an energy profile of the energy output by the energy outputting section to be an energy profile that permits the structure forming material to flow such that the structure forming material is distributed in accordance with a structure profile of the structure to be formed. According to the liquid droplet ejection apparatus, a structure having a desired structure profile is obtained.
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