Invention Grant
US07899635B2 Sampling inspection method 有权
抽样检验方法

Sampling inspection method
Abstract:
A sampling inspection method is provided. The sampling inspection method is adapted for a multi-product production line including a plurality of tools. The sampling inspection method includes the steps of: providing a tool record, which records a sampling data of each of the tools; then checking each sampling data recorded in the tool record, and finding out at least one unsampled tool from the tools; then defining a plurality of product lots as being performed with process operations by at least one of the at least one unsampled tool; and determining at least one of the product lots for performing a sampling inspection.
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