Invention Grant
- Patent Title: Sampling inspection method
- Patent Title (中): 抽样检验方法
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Application No.: US12233942Application Date: 2008-09-19
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Publication No.: US07899635B2Publication Date: 2011-03-01
- Inventor: Kai-Ping Huang , Sung-Lin Tsai , Michael Kian Ann Wee , Boon-Wah Chong
- Applicant: Kai-Ping Huang , Sung-Lin Tsai , Michael Kian Ann Wee , Boon-Wah Chong
- Applicant Address: TW Hsinchu
- Assignee: United Microelectronics Corp.
- Current Assignee: United Microelectronics Corp.
- Current Assignee Address: TW Hsinchu
- Agency: J.C. Patents
- Main IPC: G06Q99/00
- IPC: G06Q99/00 ; G01D21/00 ; G06F19/00 ; G06F17/40

Abstract:
A sampling inspection method is provided. The sampling inspection method is adapted for a multi-product production line including a plurality of tools. The sampling inspection method includes the steps of: providing a tool record, which records a sampling data of each of the tools; then checking each sampling data recorded in the tool record, and finding out at least one unsampled tool from the tools; then defining a plurality of product lots as being performed with process operations by at least one of the at least one unsampled tool; and determining at least one of the product lots for performing a sampling inspection.
Public/Granted literature
- US20100076584A1 SAMPLING INSPECTION METHOD Public/Granted day:2010-03-25
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