Invention Grant
- Patent Title: Pattern forming method
- Patent Title (中): 图案形成方法
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Application No.: US11913922Application Date: 2007-10-10
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Publication No.: US07901866B2Publication Date: 2011-03-08
- Inventor: Toshiki Ito
- Applicant: Toshiki Ito
- Applicant Address: JP Tokyo
- Assignee: Canon Kabushiki Kaisha
- Current Assignee: Canon Kabushiki Kaisha
- Current Assignee Address: JP Tokyo
- Agency: Fitzpatrick, Cella, Harper & Scinto
- Priority: JP2006-276896 20061010
- International Application: PCT/JP2007/070219 WO 20071010
- International Announcement: WO2008/047817 WO 20080424
- Main IPC: G03F7/00
- IPC: G03F7/00 ; G03F7/004 ; B05D3/00 ; B05D3/06

Abstract:
A pattern forming method includes a step of forming a photosensitive organic material layer by providing, on a substrate, a photosensitive organic material which is protected by a hydrophobic photodegradable group and is capable of generating a hydrophilic group selected from the group consisting of amino group, hydroxyl group, carboxyl group, and sulfo group by light irradiation; a step of selectively exposing the photosensitive organic material layer to light in a pattern to generate the hydrophilic group at an exposed portion; a step of providing a block polymer having a hydrophilic segment and a hydrophobic segment, on the photosensitive organic material layer after the exposure, to separate segments of the block polymer into the hydrophilic segment at a portion where the hydrophilic group generated by the exposure is present and the hydrophobic segment at a portion where the hydrophilic group is not present; and a step of removing one of the separated segments to form a pattern of the other segment.
Public/Granted literature
- US20090311633A1 PATTERN FORMING METHOD Public/Granted day:2009-12-17
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