Invention Grant
- Patent Title: Method of constructing a deviation angle self compensating substantially achromatic retarder to compensate beam traslation
- Patent Title (中): 构造偏移角自补偿基本消色差延迟器以补偿光束扫描的方法
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Application No.: US12290787Application Date: 2008-11-04
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Publication No.: US07907280B2Publication Date: 2011-03-15
- Inventor: Blaine D. Johs , Steven E. Green , Craig M. Herzinger , Duane E. Meyer , Martin M. Liphardt
- Applicant: Blaine D. Johs , Steven E. Green , Craig M. Herzinger , Duane E. Meyer , Martin M. Liphardt
- Applicant Address: US NE Lincoln
- Assignee: J.A. Woollam Co., Inc.
- Current Assignee: J.A. Woollam Co., Inc.
- Current Assignee Address: US NE Lincoln
- Agent James D. Welch
- Main IPC: G01J4/00
- IPC: G01J4/00 ; G02B5/30
Abstract:
A method of configuring a system for introducing a relative phase retardation into orthogonally polarized components of an electromagnetic beam entered thereinto, wherein the system involves a substantially achromatic multiple element retarder system for use in wide spectral range (for example, 190-1700 nm) rotating compensator spectroscopic ellipsometer and/or polarimeter systems.
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