Invention Grant
US07923702B2 System and method for processing an object 有权
用于处理对象的系统和方法

System and method for processing an object
Abstract:
A system and a method for processing and inspecting an object are provided, wherein the system comprises a particle beam column, an object holder and a gas supply apparatus. Thereby, the object holder is formed comprising a base, a first table displaceable relative to the base, a second table displaceable relative to the first table and a third table rotatable relative to the second table, wherein the cannula of the gas supply apparatus is fixed at the first table.
Public/Granted literature
Information query
Patent Agency Ranking
0/0