Invention Grant
- Patent Title: System and method for processing an object
- Patent Title (中): 用于处理对象的系统和方法
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Application No.: US12268802Application Date: 2008-11-11
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Publication No.: US07923702B2Publication Date: 2011-04-12
- Inventor: Wolfram Buhler , Alexander Rosenthal , Emmerich Bertagnolli , Heinz Wanzenbock , Markus Fischer , Gottfried Hochleitner
- Applicant: Wolfram Buhler , Alexander Rosenthal , Emmerich Bertagnolli , Heinz Wanzenbock , Markus Fischer , Gottfried Hochleitner
- Applicant Address: DE Oberkochen
- Assignee: Carl Zeiss NTS GmbH
- Current Assignee: Carl Zeiss NTS GmbH
- Current Assignee Address: DE Oberkochen
- Agency: Potomac Patent Group PLLC
- Priority: DE102007054073 20071113
- Main IPC: C23C16/458
- IPC: C23C16/458 ; C23C16/48 ; H01J49/00

Abstract:
A system and a method for processing and inspecting an object are provided, wherein the system comprises a particle beam column, an object holder and a gas supply apparatus. Thereby, the object holder is formed comprising a base, a first table displaceable relative to the base, a second table displaceable relative to the first table and a third table rotatable relative to the second table, wherein the cannula of the gas supply apparatus is fixed at the first table.
Public/Granted literature
- US20090152459A1 System and Method for Processing an Object Public/Granted day:2009-06-18
Information query
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