Invention Grant
- Patent Title: Flow control of photo-polymerizable resin
- Patent Title (中): 光聚合树脂的流动控制
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Application No.: US11290055Application Date: 2005-11-30
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Publication No.: US07932190B2Publication Date: 2011-04-26
- Inventor: Timothy B. Brown , Richard Kurth
- Applicant: Timothy B. Brown , Richard Kurth
- Applicant Address: US CA Alameda
- Assignee: Caliper Life Sciences, Inc
- Current Assignee: Caliper Life Sciences, Inc
- Current Assignee Address: US CA Alameda
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01J37/00 ; G03C5/00

Abstract:
This invention provides methods and systems, e.g., to control the flow of photo-polymerizable resins. In the method, e.g., flow of a photo-polymerizable resin is restricted from illuminated resin exclusion regions on a substrate surface by precisely situated flow barriers. A system to control photo-polymerizable resin flow includes, e.g., a light source, a mask and a substrate.
Public/Granted literature
- US20060121743A1 Flow control of photo-polymerizable resin Public/Granted day:2006-06-08
Information query
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