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US07960683B2 Observation apparatus and observation method with reflected light patterns being detected by changing a weight for each of element lights 有权
通过改变每个元件光的重量来检测具有反射光图案的观察装置和观察方法

Observation apparatus and observation method with reflected light patterns being detected by changing a weight for each of element lights
Abstract:
An observation apparatus includes a light radiating unit that radiates a plurality of element lights, each of which has a limited wavelength band, to an observation target; a light detecting unit that detects the plurality of element lights reflected by the observation target in a plurality of patterns by changing a weight for each of the element lights; and a processing unit that performs a procedure of separating a component of each of the element lights from a plurality of detection results of the light detecting unit based on the weight for each of the element lights of the light detecting unit.
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