Invention Grant
US07974726B2 Method and system for removing empty carriers from process tools by controlling an association between control jobs and carrier
有权
通过控制控制作业和载体之间的关联来从过程工具中移除空载体的方法和系统
- Patent Title: Method and system for removing empty carriers from process tools by controlling an association between control jobs and carrier
- Patent Title (中): 通过控制控制作业和载体之间的关联来从过程工具中移除空载体的方法和系统
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Application No.: US12016425Application Date: 2008-01-18
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Publication No.: US07974726B2Publication Date: 2011-07-05
- Inventor: Jan Rothe , Konrad Rosenbaum
- Applicant: Jan Rothe , Konrad Rosenbaum
- Applicant Address: US TX Austin
- Assignee: Advanced Micro Devices, Inc.
- Current Assignee: Advanced Micro Devices, Inc.
- Current Assignee Address: US TX Austin
- Agency: Williams, Morgan & Amerson
- Priority: DE102007025339 20070531
- Main IPC: G06F19/00
- IPC: G06F19/00 ; G06F7/00 ; B65H1/00
Abstract:
By providing an under-specified specification for designating a destination carrier in a respective control job or control message, a high degree of flexibility in determining the destination of processed substrates may be obtained, thereby also allowing the removal of a source carrier for enhancing load port availability in complex semiconductor facilities.
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