Invention Grant
- Patent Title: Optical heater for cryogenic ion implanter surface regeneration
- Patent Title (中): 用于低温离子注入机表面再生的光学加热器
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Application No.: US12569128Application Date: 2009-09-29
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Publication No.: US07977652B2Publication Date: 2011-07-12
- Inventor: Roger B. Fish , Jeffrey E. Krampert
- Applicant: Roger B. Fish , Jeffrey E. Krampert
- Applicant Address: US MA Gloucester
- Assignee: Varian Semiconductor Equipment Associates, Inc.
- Current Assignee: Varian Semiconductor Equipment Associates, Inc.
- Current Assignee Address: US MA Gloucester
- Main IPC: H01J37/08
- IPC: H01J37/08

Abstract:
In an ion implanter, one or more optical heaters are disposed above a pair of support arms. The support arms have an engaged positioned which is disposed beneath a platen and a retractable position displaced vertically away from the platen and rotated away from the platen in a direction parallel to a planar surface thereof. When the support arms are in the retracted position, the one or more optical heaters is configured to provide optical energy incident on surfaces of the cooling pads disposed on the support arms for removal of unwanted materials thereon. In this manner, the optical heaters are used during a regeneration cycle of cryogenic surfaces in an ion implanter.
Public/Granted literature
- US20110073780A1 OPTICAL HEATER FOR CRYOGENIC ION IMPLANTER SURFACE REGENERATION Public/Granted day:2011-03-31
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