Invention Grant
- Patent Title: Measurement system and a method
- Patent Title (中): 测量系统和方法
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Application No.: US10574758Application Date: 2004-10-07
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Publication No.: US08013301B2Publication Date: 2011-09-06
- Inventor: Aviram Tam
- Applicant: Aviram Tam
- Applicant Address: IL Rehovot
- Assignee: Applied Materials Israel, Ltd.
- Current Assignee: Applied Materials Israel, Ltd.
- Current Assignee Address: IL Rehovot
- Agency: SNR Denton US LLP
- International Application: PCT/US2004/033113 WO 20041007
- International Announcement: WO2005/036464 WO 20050421
- Main IPC: G06T7/60
- IPC: G06T7/60 ; H01J37/28
Abstract:
The invention provides a method and a measurement system. The method includes: providing a measurement model that includes measurement image information; locating a measurement area image area by utilizing the measurement image information; and performing at least one measurement to provide measurement result information.
Public/Granted literature
- US20080290288A1 Measurement System and a Method Public/Granted day:2008-11-27
Information query
