Invention Grant
- Patent Title: Bump structure with annular support
- Patent Title (中): 具有环形支撑的凸起结构
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Application No.: US11693741Application Date: 2007-03-30
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Publication No.: US08030767B2Publication Date: 2011-10-04
- Inventor: Jing-Hong Yang
- Applicant: Jing-Hong Yang
- Applicant Address: BM Hamilton
- Assignee: ChipMOS Technologies (Bermuda) Ltd.
- Current Assignee: ChipMOS Technologies (Bermuda) Ltd.
- Current Assignee Address: BM Hamilton
- Agency: Jianq Chyun IP Office
- Priority: CN200710004497 20070116
- Main IPC: H01L23/48
- IPC: H01L23/48 ; H01L23/52 ; H01L29/40

Abstract:
A bump structure with an annular support suitable for being disposed on a substrate is provided. The substrate has at least one pad and a passivation layer that has at least one opening exposing a portion of the pad. The bump structure with the annular support includes an under ball metal (UBM) layer, a bump, and an annular support. The UBM layer is disposed on the passivation layer and covers the pad exposed by the passivation layer. The bump is disposed on the UBM layer over the pad, and a diameter of a lower surface of the bump is less than the diameter of an upper surface thereof. The annular support surrounds and contacts the bump, and a material of the annular support is photoresist. An under cut effect is not apt to happen on the bump structure.
Public/Granted literature
- US20080169559A1 BUMP STRUCTURE WITH ANNULAR SUPPORT AND MANUFACTURING METHOD THEREOF Public/Granted day:2008-07-17
Information query
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