Invention Grant
- Patent Title: System and method of aligning a sample
- Patent Title (中): 校准样品的系统和方法
-
Application No.: US12378400Application Date: 2009-02-13
-
Publication No.: US08064055B2Publication Date: 2011-11-22
- Inventor: Martin H. Liphardt , Blaine D. Johs
- Applicant: Martin H. Liphardt , Blaine D. Johs
- Applicant Address: US NE Lincoln
- Assignee: J.A. Woollam Co., Inc.
- Current Assignee: J.A. Woollam Co., Inc.
- Current Assignee Address: US NE Lincoln
- Agent James D. Welch
- Main IPC: G01J4/00
- IPC: G01J4/00

Abstract:
A system and method of use thereof that enables determining and setting sample alignment based on the location of, and geometric attributes of a monitored image formed by reflection of an electromagnetic beam from a sample and into an image monitor, which beam is directed to be incident onto the sample along a locus which is substantially normal to the surface of the sample.
Public/Granted literature
- US20090207408A1 System and method of aligning a sample Public/Granted day:2009-08-20
Information query