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US08064055B2 System and method of aligning a sample 有权
校准样品的系统和方法

System and method of aligning a sample
Abstract:
A system and method of use thereof that enables determining and setting sample alignment based on the location of, and geometric attributes of a monitored image formed by reflection of an electromagnetic beam from a sample and into an image monitor, which beam is directed to be incident onto the sample along a locus which is substantially normal to the surface of the sample.
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