Invention Grant
US08092644B2 Method and apparatus for cleaning and surface conditioning objects using plasma
有权
使用等离子体清洁和表面调理物体的方法和设备
- Patent Title: Method and apparatus for cleaning and surface conditioning objects using plasma
- Patent Title (中): 使用等离子体清洁和表面调理物体的方法和设备
-
Application No.: US11421983Application Date: 2006-06-02
-
Publication No.: US08092644B2Publication Date: 2012-01-10
- Inventor: Peter Frank Kurunczi
- Applicant: Peter Frank Kurunczi
- Applicant Address: US NJ Moorestown
- Assignee: IonField Systems, LLC
- Current Assignee: IonField Systems, LLC
- Current Assignee Address: US NJ Moorestown
- Agency: Pepper Hamilton LLP
- Main IPC: B01L1/00
- IPC: B01L1/00 ; C23F3/00

Abstract:
An apparatus and method for cleaning objects using plasma are disclosed. The apparatus provides a plurality of elongated dielectric barrier members arranged adjacent each other, a plurality of electrodes each contained within, and extending substantially along the length of, the plurality of elongated dielectric barrier members, and at least one buss bar for electrically coupling the plurality of electrodes to a voltage source. The method provides providing a plurality of elongated dielectric barrier members arranged adjacent each other, providing a plurality of electrodes each contained within, and extending substantially along the length of the plurality of elongated dielectric barrier members, providing at least one buss bar connected to the plurality of electrodes, electrically coupling the plurality of electrodes to a voltage source through the at least one buss bar, introducing the objects proximate the plurality of elongated dielectric barrier members, generating a dielectric barrier discharge between the plurality of dielectric barrier members and the objects; and forming plasma to clean at least a portion of the objects.
Public/Granted literature
- US20060201534A1 METHOD AND APPARATUS FOR CLEANING AND SURFACE CONDITIONING OBJECTS USING PLASMA Public/Granted day:2006-09-14
Information query
IPC分类: