Invention Grant
US08103985B2 Method and system for implementing controlled breaks between features using sub-resolution assist features
有权
使用子分辨率辅助功能实现特征间的可控断点的方法和系统
- Patent Title: Method and system for implementing controlled breaks between features using sub-resolution assist features
- Patent Title (中): 使用子分辨率辅助功能实现特征间的可控断点的方法和系统
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Application No.: US11934662Application Date: 2007-11-02
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Publication No.: US08103985B2Publication Date: 2012-01-24
- Inventor: Jason Sweis
- Applicant: Jason Sweis
- Applicant Address: US CA San Jose
- Assignee: Cadence Design Systems, Inc.
- Current Assignee: Cadence Design Systems, Inc.
- Current Assignee Address: US CA San Jose
- Agency: Vista IP Law Group, LLP
- Main IPC: G06F17/50
- IPC: G06F17/50
Abstract:
Disclosed is a method, system, and computer program product for implementing controlled breaks using sub-resolution assist features. Sub-resolution bridging features are added to implement controlled breaks between features on the layout. The bridging features may also be used to facilitate or optimize multiple mask/exposure techniques that split a layout or features on a layout to address pitch problems.
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