An oscillator that includes a movable element formed of silicon, the movable element vibrating by electrostatic force, a stationary element supporting the movable element, a temperature detector located in contact with the stationary element, the temperature detector detecting the temperature of the stationary element, a supporting element joined to a joint surface between the movable element and the stationary element, the supporting element supporting the movable element, the stationary element, and the temperature detector on a surface opposite to the joint surface, a surrounding element contacted with the supporting element, the surrounding element and the supporting element surround the movable element, and electrodes provided on a surface of the surrounding element opposite to a surface of surrounding element contacted with the supporting element.