Invention Grant
- Patent Title: Increasing current in charged particle sources and systems
- Patent Title (中): 增加带电粒子源和系统中的电流
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Application No.: US12493566Application Date: 2009-06-29
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Publication No.: US08124941B2Publication Date: 2012-02-28
- Inventor: John A. Notte, IV , Randall Percival , Colin A. Sanford , Alexander Grohloski
- Applicant: John A. Notte, IV , Randall Percival , Colin A. Sanford , Alexander Grohloski
- Applicant Address: US MA Peabody
- Assignee: Carl Zeiss NTS, LLC
- Current Assignee: Carl Zeiss NTS, LLC
- Current Assignee Address: US MA Peabody
- Agency: Fish & Richardson P.C.
- Main IPC: H01J37/08
- IPC: H01J37/08 ; H01J27/26
Abstract:
Disclosed are charged particle systems that include a tip, at least one gas inlet configured to supply gas particles to the tip, and a element having a curved surface positioned to adsorb un-ionized gas particles, and to direct desorbing gas particles to propagate toward the tip. The charged particle systems can include a field shunt connected to the tip, and configured to adjust an electric field at an apex of the tip.
Public/Granted literature
- US20100012839A1 INCREASING CURRENT IN CHARGED PARTICLE SOURCES AND SYSTEMS Public/Granted day:2010-01-21
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