Invention Grant
- Patent Title: Multi-channel developer system
- Patent Title (中): 多渠道开发者系统
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Application No.: US12334156Application Date: 2008-12-12
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Publication No.: US08127713B2Publication Date: 2012-03-06
- Inventor: Eric B. Britcher , Yevgeniy Rabinovich , Svetlana Sherman , Masami Ohtani
- Applicant: Eric B. Britcher , Yevgeniy Rabinovich , Svetlana Sherman , Masami Ohtani
- Applicant Address: JP Kyoto
- Assignee: Sokudo Co., Ltd.
- Current Assignee: Sokudo Co., Ltd.
- Current Assignee Address: JP Kyoto
- Agency: Kilpatrick Townsend & Stockton LLP
- Main IPC: B05C11/00
- IPC: B05C11/00

Abstract:
An apparatus for dispensing fluid during semiconductor substrate processing operations comprises an enclosure having a first side and a second side. The enclosure comprises a first processing station and a second processing station. The second processing station is positioned adjacent to the first processing station. In addition, the substrate processing apparatus includes a first dispense arm configured to deliver a fluid to the first processing station wherein the first dispense arm is positioned between the first side and the first processing station and a second dispense arm configured to deliver the fluid to the second processing station wherein the second dispense arm is positioned between the second side and the second processing station. The substrate processing apparatus also comprises a first rinse arm configured to deliver a rinsing fluid to the first processing station and a second rinse arm configured to deliver the rinsing fluid to the second processing station.
Public/Granted literature
- US20100151690A1 MULTI-CHANNEL DEVELOPER SYSTEM Public/Granted day:2010-06-17
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