Invention Grant
- Patent Title: Vacuum apparatus of rotary motion entry
- Patent Title (中): 旋转运动进入真空装置
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Application No.: US12615811Application Date: 2009-11-10
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Publication No.: US08146923B2Publication Date: 2012-04-03
- Inventor: Kuan-Chou Chen , Fu-Ching Tung , Chia-Ming Chen , Pei-Shan Wu , Tean-Mu Shen , Jung-Chen Ho
- Applicant: Kuan-Chou Chen , Fu-Ching Tung , Chia-Ming Chen , Pei-Shan Wu , Tean-Mu Shen , Jung-Chen Ho
- Applicant Address: TW Hsin-Chu
- Assignee: Industrial Technology Research Institute
- Current Assignee: Industrial Technology Research Institute
- Current Assignee Address: TW Hsin-Chu
- Agency: Morris Manning & Martin LLP
- Agent Tim Tingkang Xia, Esq.
- Priority: TW98133583A 20091002
- Main IPC: F16J15/54
- IPC: F16J15/54

Abstract:
A vacuum apparatus of rotary motion entry is disclosed, which comprises: a shaft sleeve, disposed on a cavity wall of a vacuum system; a rotary shaft, ensheathed by the shaft sleeve; and a transmission set, connected to the rotary shaft for driving the same; wherein, the rotary shaft is disposed passing through a hole formed on the base of the shaft sleeve while there are a first bearing, a second bearing, a sealing ring and a shaft seal being arranged separately inside the hole. Moreover, the shaft seal has a flake-like lip flange formed extending toward the center of the hole, that is capable of being extended away from the vacuum system by the inserting of the rotary shaft into the hole, and thereby, enabling the lip flange to engage with the rotary shaft tightly by the atmospheric pressure and thus isolating the outside world from the vacuum system.
Public/Granted literature
- US20110079963A1 VACUUM APPARATUS OF ROTARY MOTION ENTRY Public/Granted day:2011-04-07
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