Invention Grant
- Patent Title: Reflective optical systems and their fabrication
- Patent Title (中): 反光光学系统及其制造
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Application No.: US12306466Application Date: 2007-07-02
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Publication No.: US08147669B2Publication Date: 2012-04-03
- Inventor: Iain Alexander Neil , Robert Banham , John Earl Hill , Guiseppe Valsecchi
- Applicant: Iain Alexander Neil , Robert Banham , John Earl Hill , Guiseppe Valsecchi
- Applicant Address: IT Bosisio Parini
- Assignee: Media Lario S.R.L.
- Current Assignee: Media Lario S.R.L.
- Current Assignee Address: IT Bosisio Parini
- Agency: Opticus IP Law PLLC
- Priority: EP06425455 20060630
- International Application: PCT/EP2007/005854 WO 20070702
- International Announcement: WO2008/000520 WO 20080103
- Main IPC: C25D1/00
- IPC: C25D1/00 ; G02B5/00

Abstract:
A process for fabricating a reflective optical system is disclosed that includes providing first and second mandrels that form a mandrel assembly, and positioning the mandrel assembly in an electroforming bath. The process also includes performing an electroforming operation for a predetermined period, thereby forming an optical system on the mandrel assembly. The process further involves separating the mandrel assembly from the optical system. The resulting optical system is reflective and has at least first and second elongate hollow sections each having an axis corresponding to the axis of elongation of a respective mandrel. The reflective optical system may be used as an afocal relay and used in lithography applications.
Public/Granted literature
- US20090314646A1 Reflective optical systems and their fabrication Public/Granted day:2009-12-24
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