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US08147670B2 Profile control on ring anode plating chambers for multi-step recipes 有权
环形阳极电镀室的轮廓控制用于多步骤配方

Profile control on ring anode plating chambers for multi-step recipes
Abstract:
The present disclosure generally addresses the problem of controlling a plating profile in multi-step recipes and addresses, in particular, the problem of compensating for variations of the plating tool state to stabilize the plating results. The compensation is done by adjustments of corrections factors for currents of a plating tool in a multi-anode configuration. The described method enables control of recipes with different current ratios in each recipe step and models different deposition sensitivities in each recipe step. Generally, the method of the present disclosure requires a measurement step, where the tool state is determined, and a data processing step, where the correction factors are set based on models describing the plating process and the tool state.
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