Invention Grant
US08147670B2 Profile control on ring anode plating chambers for multi-step recipes
有权
环形阳极电镀室的轮廓控制用于多步骤配方
- Patent Title: Profile control on ring anode plating chambers for multi-step recipes
- Patent Title (中): 环形阳极电镀室的轮廓控制用于多步骤配方
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Application No.: US12119730Application Date: 2008-05-13
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Publication No.: US08147670B2Publication Date: 2012-04-03
- Inventor: Sylvia Boehlmann , Dirk Wollstein , Susanne Wehner
- Applicant: Sylvia Boehlmann , Dirk Wollstein , Susanne Wehner
- Applicant Address: US TX Austin
- Assignee: Advanced Micro Devices, Inc.
- Current Assignee: Advanced Micro Devices, Inc.
- Current Assignee Address: US TX Austin
- Agency: Williams, Morgan & Amerson, P.C.
- Priority: DE102007041205 20070831; DE102008009641 20080218
- Main IPC: C25D21/12
- IPC: C25D21/12

Abstract:
The present disclosure generally addresses the problem of controlling a plating profile in multi-step recipes and addresses, in particular, the problem of compensating for variations of the plating tool state to stabilize the plating results. The compensation is done by adjustments of corrections factors for currents of a plating tool in a multi-anode configuration. The described method enables control of recipes with different current ratios in each recipe step and models different deposition sensitivities in each recipe step. Generally, the method of the present disclosure requires a measurement step, where the tool state is determined, and a data processing step, where the correction factors are set based on models describing the plating process and the tool state.
Public/Granted literature
- US20090057153A1 PROFILE CONTROL ON RING ANODE PLATING CHAMBERS FOR MULTI-STEP RECIPES Public/Granted day:2009-03-05
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