Invention Grant
- Patent Title: Splashguard for high flow vacuum bubbler vessel
- Patent Title (中): Splashguard用于高流量真空起泡器容器
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Application No.: US12407279Application Date: 2009-03-19
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Publication No.: US08162296B2Publication Date: 2012-04-24
- Inventor: Charles Michael Birtcher , Thomas Andrew Steidl
- Applicant: Charles Michael Birtcher , Thomas Andrew Steidl
- Applicant Address: US PA Allentown
- Assignee: Air Products and Chemicals, Inc.
- Current Assignee: Air Products and Chemicals, Inc.
- Current Assignee Address: US PA Allentown
- Agent Rosaleen P. Morris-Oskanian
- Main IPC: B01F3/04
- IPC: B01F3/04

Abstract:
The present invention is a container having a diptube inlet, at least one baffle disc positioned between the outlet of the diptube and the outlet of the container to provide a narrow annular space between the baffle disc and the sidewall of the container to prevent liquid droplets from entering the outlet to the container and the inner surface of the container sidewall and an annular, radially inward projecting deflector ledge on the sidewall, proximate the baffle disc. The present invention is also a process of delivering a chemical precursor from a container having the above structure. Liquid and vapor delivery are both contemplated.
Public/Granted literature
- US20100237085A1 Splashguard for High Flow Vacuum Bubbler Vessel Public/Granted day:2010-09-23
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