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    HIGH VOLUME DELIVERY SYSTEM FOR GALLIUM TRICHLORIDE
    1.
    发明申请
    HIGH VOLUME DELIVERY SYSTEM FOR GALLIUM TRICHLORIDE 审中-公开
    用于三氯化镓的高容量输送系统

    公开(公告)号：US20100242835A1

    公开(公告)日：2010-09-30

    申请号：US12303950

    申请日：2007-06-08

    Applicant: Chantal Arena ,  Christiaan J. Werkhoven ,  Thomas Andrew Steidl ,  Charles Michael Birtcher ,  Robert Daniel Clark

    Inventor： Chantal Arena ,  Christiaan J. Werkhoven ,  Thomas Andrew Steidl ,  Charles Michael Birtcher ,  Robert Daniel Clark

    IPC: C23C16/34 ,  C30B23/02

    CPC classification number: C30B29/40 ,  C30B25/02 ,  C30B25/165 ,  C30B29/403 ,  C30B29/406

    Abstract: The present invention is related to the field of semiconductor processing equipment and methods and provides, in particular, methods and equipment for the sustained, high-volume production of Group III-V compound semiconductor material suitable for fabrication of optic and electronic components, for use as substrates for epitaxial deposition, for wafers and so forth. In preferred embodiments, these methods and equipment are optimized for producing Group III-N (nitrogen) compound semiconductor wafers and specifically for producing GaN wafers. Specifically, the precursor is provided at a mass flow of at least 50 g Group III element/hour for a time of at least 48 hours to facilitate high volume manufacture of the semiconductor material. Advantageously, the mass flow of the gaseous Group III precursor is controlled to deliver the desired amount.

    Abstract translation: 本发明涉及半导体处理设备和方法的领域，并且特别提供用于持续，大批量生产适用于制造光学和电子部件的III-V族化合物半导体材料的方法和设备，以供使用 作为用于外延沉积的衬底，用于晶片等。 在优选实施例中，这些方法和设备被优化用于生产III-N（氮）化合物半导体晶片，并且专门用于生产GaN晶片。 具体地说，以至少50g III族元素/小时的质量流量提供前体至少48小时以促进半导体材料的大量制造。 有利地，控制气态III族前体的质量流量以输送所需量。

    Chemical delivery system with spill containment door
    4.
    发明授权
    Chemical delivery system with spill containment door 有权
    化学物质输送系统带有泄漏安全门

    公开(公告)号：US06276404B1

    公开(公告)日：2001-08-21

    申请号：US09661750

    申请日：2000-09-14

    Applicant: Charles Michael Birtcher ,  Thomas Andrew Steidl ,  William J. Sheehy

    Inventor： Charles Michael Birtcher ,  Thomas Andrew Steidl ,  William J. Sheehy

    IPC: B65B104

    CPC classification number: B67D7/3209 ,  B67D7/84

    Abstract: A high purity chemical storage and delivery system and process with secondary containment, comprising; a cabinet for containing a canister of high purity chemical, a manifold in the cabinet for fluid connection between the canister and the cabinet for controllably dispensing high purity chemical; a control unit for controlling the dispensing of high purity chemical from the canister and the cabinet for a downstream use, a closeable opening in the cabinet for allowing loading and unloading of the canister from the cabinet, at least one door for closing the opening, a liquid tight secondary containment door in the opening for closing off a portion of the opening such that the secondary containment door is sized so that the portion is sufficient to define a volume in conjunction with the cabinet to contain the entire high purity chemical liquid contents of the canister.

    Abstract translation: 一种高纯度化学品储存和输送系统及具有次级容纳物的方法，包括： 用于容纳高纯度化学品的罐的柜，在柜中的歧管，用于罐和柜之间的流体连接，用于可控地分配高纯度化学品; 控制单元，用于控制从罐和机柜排出高纯度化学品用于下游用途;机壳中的可关闭开口，用于允许罐从柜体装载和卸载;至少一个门，用于关闭开口; 用于封闭开口的一部分的液密的二级容纳门，使得二级容纳门的尺寸设定成使得该部分足以与橱柜一起限定体积以容纳整个高纯度化学液体内容物 罐。

    Solid source container with inlet plenum
    5.
    发明授权
    Solid source container with inlet plenum 有权
    固体源容器带入口通风

    公开(公告)号：US09109287B2

    公开(公告)日：2015-08-18

    申请号：US11867171

    申请日：2007-10-04

    Applicant: Charles Michael Birtcher ,  Thomas Andrew Steidl

    Inventor： Charles Michael Birtcher ,  Thomas Andrew Steidl

    IPC: C23C16/448

    CPC classification number: C23C16/4481

    Abstract: A vessel for conveying a precursor fluid from the vessel, comprising: an interior volume having an upper volume and a lower volume, wherein the two volumes are in communication and the lower volume contains precursor; a lid comprising a fluid inlet directing carrier gas into the vessel, a “T” fluid outlet, a sidewall having an upper lip wherein the upper lip contacts the lid; a separator interposed between the lid and the sidewall wherein the separator resides adjacent the upper lip and segments the interior volume into the upper volume and a lower volume; and an inlet plenum in communication with the fluid inlet having a plenum chamber opening towards the separator to direct the carrier gas through the separator and towards the precursor. A method for using the apparatus is also disclosed.

    Abstract translation: 一种用于从容器输送前体流体的容器，包括：具有上部体积和较小体积的内部容积，其中两个体积连通，下部体积含有前体; 包括将载气引导到容器中的流体入口的盖，“T”流体出口，具有上唇的侧壁，其中上唇与盖接触; 插入在所述盖和所述侧壁之间的隔板，其中所述隔板邻近所述上唇并且将所述内部容积分成上部容积和下部容积; 并且与流体入口连通的入口增压室具有朝向分离器的开口腔，以将载气引导通过分离器并朝向前体。 还公开了一种使用该装置的方法。

    Splashguard and Inlet Diffuser for High Vacuum, High Flow Bubbler Vessel
    6.
    发明申请
    Splashguard and Inlet Diffuser for High Vacuum, High Flow Bubbler Vessel 有权
    用于高真空，高流量泡罩容器的防溅和入口扩散器

    公开(公告)号：US20080143002A1

    公开(公告)日：2008-06-19

    申请号：US11939109

    申请日：2007-11-13

    Applicant: Thomas Andrew Steidl ,  Charles Michael Birtcher ,  Xinjian Lei

    Inventor： Thomas Andrew Steidl ,  Charles Michael Birtcher ,  Xinjian Lei

    IPC: B01F3/04

    CPC classification number: C23C16/4482 ,  C23C16/448

    Abstract: The present invention is a bubbler having a diptube inlet ending in a bubble size reducing outlet and at least one baffle disc positioned between the outlet of the diptube and the outlet of the bubbler to provide a narrow annular space between the baffle disc and the wall of the bubbler to prevent liquid droplets from entering the outlet to the bubbler. The bubble size reducing outlet is an elongated cylindrical porous metal frit situated in a sump of approximately the same dimensions. A metal frit is placed at the inlet of the outlet of the bubbler. The present invention is also a process of delivering a chemical precursor from a bubbler vessel having the above structure.

    Abstract translation: 本发明是一种起泡器，其具有终止于气泡尺寸减小出口的二通孔入口和至少一个位于汲取管的出口和起泡器的出口之间的挡板，以在挡板和壁之间提供窄的环形空间 起泡器以防止液滴进入出口到起泡器。 气泡尺寸减小出口是位于大致相同尺寸的贮槽中的细长圆柱形多孔金属玻璃料。 金属玻璃料放置在起泡器出口的入口处。 本发明也是从具有上述结构的起泡容器输送化学前体的方法。

    Solid Source Container With Inlet Plenum
    7.
    发明申请
    Solid Source Container With Inlet Plenum 有权
    固体来源容器与入口大会

    公开(公告)号：US20080092816A1

    公开(公告)日：2008-04-24

    申请号：US11867171

    申请日：2007-10-04

    Applicant: Charles Michael Birtcher ,  Thomas Andrew Steidl

    Inventor： Charles Michael Birtcher ,  Thomas Andrew Steidl

    IPC: B05C11/10 ,  B05B17/04 ,  B05B7/26

    CPC classification number: C23C16/4481

    Abstract: A vessel for conveying a precursor fluid from the vessel, comprising: an interior volume having an upper volume and a lower volume, wherein the two volumes are in communication and the lower volume contains precursor; a lid comprising a fluid inlet directing carrier gas into the vessel, a “T” fluid outlet, a sidewall having an upper lip wherein the upper lip contacts the lid; a separator interposed between the lid and the sidewall wherein the separator resides adjacent the upper lip and segments the interior volume into the upper volume and a lower volume; and an inlet plenum in communication with the fluid inlet having a plenum chamber opening towards the separator to direct the carrier gas through the separator and towards the precursor. A method for using the apparatus is also disclosed.

    Abstract translation: 一种用于从容器输送前体流体的容器，包括：具有上部体积和较小体积的内部容积，其中两个体积连通，下部体积含有前体; 包括将载气引导到容器中的流体入口的盖，“T”流体出口，具有上唇的侧壁，其中上唇接触盖; 插入在所述盖和所述侧壁之间的隔板，其中所述隔板邻近所述上唇并且将所述内部容积分成上部容积和下部容积; 并且与流体入口连通的入口增压室具有朝向分离器的开口腔，以将载气引导通过分离器并朝向前体。 还公开了一种使用该装置的方法。

    Splashguard and inlet diffuser for high vacuum, high flow bubbler vessel
    8.
    发明授权
    Splashguard and inlet diffuser for high vacuum, high flow bubbler vessel 有权
    用于高真空，高流量起泡器容器的防溅和入口扩散器

    公开(公告)号：US08708320B2

    公开(公告)日：2014-04-29

    申请号：US11939109

    申请日：2007-11-13

    Applicant: Thomas Andrew Steidl ,  Charles Michael Birtcher ,  Xinjian Lei

    Inventor： Thomas Andrew Steidl ,  Charles Michael Birtcher ,  Xinjian Lei

    IPC: B01F3/04

    CPC classification number: C23C16/4482 ,  C23C16/448

    Abstract: The present invention is a bubbler having a diptube inlet ending in a bubble size reducing outlet and at least one baffle disc positioned between the outlet of the diptube and the outlet of the bubbler to provide a narrow annular space between the baffle disc and the wall of the bubbler to prevent liquid droplets from entering the outlet to the bubbler. The bubble size reducing outlet is an elongated cylindrical porous metal frit situated in a sump of approximately the same dimensions. A metal frit is placed at the inlet of the outlet of the bubbler. The present invention is also a process of delivering a chemical precursor from a bubbler vessel having the above structure.

    Abstract translation: 本发明是一种起泡器，其具有终止于气泡尺寸减小出口的二通孔入口和至少一个位于汲取管的出口和起泡器的出口之间的挡板，以在挡板和壁之间提供窄的环形空间 起泡器以防止液滴进入出口到起泡器。 气泡尺寸减小出口是位于大致相同尺寸的贮槽中的细长圆柱形多孔金属玻璃料。 金属玻璃料放置在起泡器出口的入口处。 本发明也是从具有上述结构的起泡容器输送化学前体的方法。

    Splashguard for high flow vacuum bubbler vessel
    9.
    发明授权
    Splashguard for high flow vacuum bubbler vessel 有权
    Splashguard用于高流量真空起泡器容器

    公开(公告)号：US08162296B2

    公开(公告)日：2012-04-24

    申请号：US12407279

    申请日：2009-03-19

    Applicant: Charles Michael Birtcher ,  Thomas Andrew Steidl

    Inventor： Charles Michael Birtcher ,  Thomas Andrew Steidl

    IPC: B01F3/04

    CPC classification number: B01J4/008 ,  B01J4/02

    Abstract: The present invention is a container having a diptube inlet, at least one baffle disc positioned between the outlet of the diptube and the outlet of the container to provide a narrow annular space between the baffle disc and the sidewall of the container to prevent liquid droplets from entering the outlet to the container and the inner surface of the container sidewall and an annular, radially inward projecting deflector ledge on the sidewall, proximate the baffle disc. The present invention is also a process of delivering a chemical precursor from a container having the above structure. Liquid and vapor delivery are both contemplated.

    Abstract translation: 本发明是一种具有汲取管入口的容器，至少一个位于汲取管的出口和容器出口之间的挡板，以在挡板和容器的侧壁之间提供窄的环形空间，以防止液滴从 进入容器的出口和容器侧壁的内表面以及邻近挡板的侧壁上的环形径向向内突出的偏转器凸缘。 本发明也是从具有上述结构的容器输送化学前体的方法。 液态和蒸气输送都是预期的。

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