Invention Grant
- Patent Title: Terahertz-infrared ellipsometer system, and method of use
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Application No.: US12456791Application Date: 2009-06-23
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Publication No.: US08169611B2Publication Date: 2012-05-01
- Inventor: Craig M. Herzinger , Matias M. Schubert , Tino Hofmann , Martin M. Liphardt , John A. Woollam
- Applicant: Craig M. Herzinger , Matias M. Schubert , Tino Hofmann , Martin M. Liphardt , John A. Woollam
- Applicant Address: US NE Lincoln US NE Lincoln
- Assignee: University of Nebraska Board of Regents,J. A. Woollam Co., Inc.
- Current Assignee: University of Nebraska Board of Regents,J. A. Woollam Co., Inc.
- Current Assignee Address: US NE Lincoln US NE Lincoln
- Agent James D. Welch
- Main IPC: G01J4/00
- IPC: G01J4/00

Abstract:
The present invention relates to ellipsometer and polarimeter systems, and more particularly is an ellipsometer or polarimeter or the like system which operates in a frequency range between 300 GHz or lower and extending to higher than at least 1 Tera-hertz (THz), and preferably through the Infra-red (IR) range up to, and higher than 100 THz, including: a source such as a backward wave oscillator; a Smith-Purcell cell; a free electron laser, or an FTIR source and a solid state device; and a detector such as a Golay cell; a bolometer or a solid state detector; and preferably including at least one odd-bounce polarization state image rotating system, and optionally including a polarizer, at least one compensator and/or modulator, in addition to an analyzer.
Public/Granted literature
- US20100220313A1 Terahertz-infrared ellipsometer system, and method of use Public/Granted day:2010-09-02
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