Invention Grant
US08173280B2 Nickel oxide film for bolometer and method for manufacturing thereof, and infrared detector using the same 有权
测辐射热量计的氧化镍膜及其制造方法以及使用其的红外线检测器

Nickel oxide film for bolometer and method for manufacturing thereof, and infrared detector using the same
Abstract:
There are provided a nickel oxide film for a bolometer and a manufacturing method thereof, and an infrared detector using the nickel oxide film. The nickel oxide film has properties with a TCR value greater than −3%/° C., a low noise value, and stable and high reproducibility properties. The nickel oxide film is applicable to manufacturing an infrared detector using a nickel oxide film for a bolometer.
Information query
Patent Agency Ranking
0/0