Invention Grant
US08173280B2 Nickel oxide film for bolometer and method for manufacturing thereof, and infrared detector using the same
有权
测辐射热量计的氧化镍膜及其制造方法以及使用其的红外线检测器
- Patent Title: Nickel oxide film for bolometer and method for manufacturing thereof, and infrared detector using the same
- Patent Title (中): 测辐射热量计的氧化镍膜及其制造方法以及使用其的红外线检测器
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Application No.: US12608657Application Date: 2009-10-29
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Publication No.: US08173280B2Publication Date: 2012-05-08
- Inventor: Hee-Chul Lee , Dong Soo Kim , Yong-Soo Lee
- Applicant: Hee-Chul Lee , Dong Soo Kim , Yong-Soo Lee
- Applicant Address: KR
- Assignee: Korea Advanced Institute of Science and Technology
- Current Assignee: Korea Advanced Institute of Science and Technology
- Current Assignee Address: KR
- Agency: The Belles Group, P.C.
- Priority: KR10-2008-0135149 20081229
- Main IPC: C01G53/04
- IPC: C01G53/04 ; C01B33/20 ; B32B15/00 ; B05D3/02

Abstract:
There are provided a nickel oxide film for a bolometer and a manufacturing method thereof, and an infrared detector using the nickel oxide film. The nickel oxide film has properties with a TCR value greater than −3%/° C., a low noise value, and stable and high reproducibility properties. The nickel oxide film is applicable to manufacturing an infrared detector using a nickel oxide film for a bolometer.
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