Invention Grant
US08188451B1 Electron generation and delivery system for contamination sensitive emitters
有权
用于污染敏感发射器的电子发射和传输系统
- Patent Title: Electron generation and delivery system for contamination sensitive emitters
- Patent Title (中): 用于污染敏感发射器的电子发射和传输系统
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Application No.: US12561969Application Date: 2009-09-17
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Publication No.: US08188451B1Publication Date: 2012-05-29
- Inventor: Mehran Nasser-Ghodsi
- Applicant: Mehran Nasser-Ghodsi
- Applicant Address: US CA San Jose
- Assignee: KLA-Tencor Corporation
- Current Assignee: KLA-Tencor Corporation
- Current Assignee Address: US CA San Jose
- Agency: JDI Patent
- Agent Joshua D. Isenberg
- Main IPC: H01J1/304
- IPC: H01J1/304 ; H01J3/12

Abstract:
Contamination may be removed from an emitter tip of a field emitter during operation of the emitter tip in a system having an electron beam column having an electrode with a beam defining aperture, an electron collector located proximate to the beam defining aperture between the electrode and the field emitter, and an electron deflector located between the emitter tip and the electron collector. At regular predetermined intervals an electron beam from the emitter tip may be deflected away from a path through the beam defining aperture and onto the electron collector. An electron beam current to the electron collector may be determined and the emitter tip may be flash heated if the current to the electron collector is below a threshold.
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