公开(公告)号：US12087540B2

公开(公告)日：2024-09-10

申请号：US17297215

申请日：2019-11-27

Applicant: CAT BEAM TECH CO., LTD.

Inventor： Jehwang Ryu ,  Seung Jun Yeo ,  Jong Min Lim ,  Woo Seob Kim ,  Jeung Sun Ahn ,  Moonkyoo Kong ,  Jae Ik Jung ,  Jun Young Park

IPC: H01J1/304 ,  H01J35/06 ,  H01J35/10

CPC classification number: H01J1/304 ,  H01J35/065 ,  H01J35/10 ,  H01J2201/30469 ,  H01J2235/1033

Abstract: Disclosed is a field emission-type tomosynthesis system including a vacuum body having a space therein; a plurality of sources provided inside the body, wherein each of the sources emits a plurality of electrons; and a plurality of anodes disposed inside the body to face the sources and responsible for emitting a plurality of X-rays, wherein each of the anodes faces a corresponding source among the sources, and the electrons collide with each of the anodes to generate X-rays, wherein the X-ray emission angle of each of the anodes is capable of being independently adjusted so as to focus the X-rays emitted toward an object located outside the body. With this configuration, a plurality of X-rays is focused on an object and is emitted to the object to obtain information, and the information is synthesized, thereby improving the reliability of information about the object.

公开(公告)号：US20240234074A9

公开(公告)日：2024-07-11

申请号：US18070197

申请日：2022-11-28

Applicant: AweXome Ray, Inc.

Inventor： Hong Soo CHOI ,  Young Bae KIM ,  Hyeongu CHO ,  Namkyu LEE ,  Keunsoo JEONG ,  Se Hoon GIHM ,  Jiwon CHOI

IPC: H01J35/06 ,  H01J1/304 ,  H01J35/08 ,  H01J35/14

CPC classification number: H01J35/065 ,  H01J1/304 ,  H01J35/08 ,  H01J35/14 ,  H01J2201/30469 ,  H01J2235/06

Abstract: An emitter, a field emission assembly, and an electromagnetic wave generator are provided, and the emitter is an emitter for emitting electrons in an electromagnetic wave generator and is in the form of a sheet in which a plurality of yarns including carbon nanotube (CNT) fibers are weaved.

公开(公告)号：US12020890B2

公开(公告)日：2024-06-25

申请号：US18247257

申请日：2021-09-29

Applicant: NCX Corporation

Inventor： Jian Zhang

IPC: H01J1/46 ,  H01J1/304 ,  H01J9/18

CPC classification number: H01J1/46 ,  H01J1/304 ,  H01J9/18

Abstract: A field emission cathode device and formation method involves a rotating field emission cathode including a field emission material deposited on a surface thereof, the field emission cathode rotating about an axis and being electrically connected to ground, and a planar gate electrode extending parallel to the surface of the rotating field emission cathode and defining a gap therebetween. A gate voltage source is electrically connected to the gate electrode and is arranged to interact therewith to generate an electric field, with the electric field inducing a portion of the surface of the rotating field emission cathode adjacent to the gate electrode to emit electrons from the field emission material toward and through the gate electrode.

公开(公告)号：US20230411104A1

公开(公告)日：2023-12-21

申请号：US18247298

申请日：2021-09-29

Applicant: NCX Corporation

Inventor： Cheng QIAN

IPC: H01J9/02 ,  H01J1/304

CPC classification number: H01J9/025 ,  H01J2201/30469 ,  H01J1/3048

Abstract: A method for fabricating an electron field emission cathode, the field emission cathode including a substrate having a field emission layer engaged therewith, where the field emission layer incorporates modified carbon nanotubes and a matrix material to improve field emission characteristics of the cathode and field emission cathode devices implementing such cathodes.

公开(公告)号：US11715615B2

公开(公告)日：2023-08-01

申请号：US17858943

申请日：2022-07-06

Applicant: KLA Corporation

Inventor： Edgardo Garcia Berrios ,  J. Joseph Armstrong ,  Yinying Xiao-Li ,  John Fielden ,  Yung-Ho Alex Chuang

IPC: H01J1/304 ,  H01J3/02 ,  H01J37/073 ,  H01J35/06 ,  H01J37/28 ,  H01J37/317

CPC classification number: H01J1/3044 ,  H01J3/022 ,  H01J37/073 ,  H01J35/065 ,  H01J37/28 ,  H01J37/3174

Abstract: A light modulated electron source utilizes a photon-beam source to modulate the emission current of an electron beam emitted from a silicon-based field emitter. The field emitter's cathode includes a protrusion fabricated on a silicon substrate and having an emission tip covered by a coating layer. An extractor generates an electric field that attracts free electrons toward the emission tip for emission as part of the electron beam. The photon-beam source generates a photon beam including photons having an energy greater than the bandgap of silicon, and includes optics that direct the photon beam onto the emission tip, whereby each absorbed photon creates a photo-electron that combines with the free electrons to enhance the electron beam's emission current. A controller modulates the emission current by controlling the intensity of the photon beam applied to the emission tip. A monitor measures the electron beam and provides feedback to the controller.

公开(公告)号：US11688579B2

公开(公告)日：2023-06-27

申请号：US17549854

申请日：2021-12-13

Applicant: ASML Netherlands B.V.

Inventor： Juying Dou ,  Zheng Fan ,  Tzu-Yi Kuo ,  Zhong-wei Chen

IPC: H01J37/073 ,  H01J37/065 ,  H01J1/304 ,  H01J1/14 ,  H01J9/02 ,  H01J9/04 ,  H01J37/26

CPC classification number: H01J37/073 ,  H01J1/14 ,  H01J1/304 ,  H01J9/025 ,  H01J9/042 ,  H01J37/065 ,  H01J37/26 ,  H01J2201/196 ,  H01J2201/30403 ,  H01J2201/30426 ,  H01J2201/30449 ,  H01J2201/30484 ,  H01J2201/30492 ,  H01J2209/0223 ,  H01J2237/06308 ,  H01J2237/06316 ,  H01J2237/06341

Abstract: Electron emitters and methods of fabricating the electron emitters are disclosed. According to certain embodiments, an electron emitter includes a tip with a planar region having a diameter in a range of approximately (0.05-10) micrometers. The electron emitter tip is configured to release field emission electrons. The electron emitter further includes a work-function-lowering material coated on the tip.

公开(公告)号：US11651924B1

公开(公告)日：2023-05-16

申请号：US17846498

申请日：2022-06-22

Applicant: FEI Company

Inventor： Kun Liu ,  Chad Rue ,  Alan Stephen Bahm

IPC: H01J37/073 ,  H01J1/304 ,  H01J1/34 ,  H01J19/24

CPC classification number: H01J1/3044 ,  H01J1/34 ,  H01J19/24 ,  H01J37/073 ,  H01J2201/30415 ,  H01J2201/30449 ,  H01J2237/06341

Abstract: Methods of producing microrods for electron emitters and associated microrods and electron emitters. In one example, a method of producing a microrod for an electron emitter comprises providing a bulk crystal ingot, removing a first plate from the bulk crystal ingot, reducing a thickness of the first plate to produce a second plate, and milling the second plate to produce one or more microrods. In another example, a microrod for an electron emitter comprises a microrod tip region that comprises a nanoneedle that in turn comprises a nanorod and a nanoprotrusion tip. The microrod and the nanoneedle are integrally formed from a bulk crystal ingot by sequentially: (i) removing the microrod from the bulk crystal ingot; (ii) coarse processing the microrod tip region to produce the nanorod; and (iii) fine processing the nanorod to produce the nanoprotrusion tip.

公开(公告)号：US11373833B1

公开(公告)日：2022-06-28

申请号：US16591030

申请日：2019-10-02

Applicant: Government of the United States of America as represented by the Secretary of the Air Force

Inventor： Brad Winston Hoff ,  Wilkin Wai-Hang Tang ,  Sterling Ryan Beeson ,  Ali Sayir

IPC: H01J1/62 ,  H01J9/00 ,  H01J9/02 ,  H01J1/304

Abstract: Systems, methods and apparatus related to a method for constructing a field emission device. The method includes providing a metal cathode substrate; shaping a carbon fiber fabric into a pattern, creating a patterned carbon fiber fabric; and brazing at least a portion of the patterned carbon fiber fabric to the metal cathode substrate.

公开(公告)号：US20220028644A1

公开(公告)日：2022-01-27

申请号：US17297215

申请日：2019-11-27

Applicant: UNIVERSITY-INDUSTRY COOPERATION GROUP OF KYUNG HEE UNIVERSITY

Inventor： Jehwang RYU ,  Seung Jun YEO ,  Jong Min LIM ,  Woo Seob KIM ,  Jeung Sun AHN ,  Moonkyoo KONG ,  Jae Ik JUNG ,  Jun Young PARK

IPC: H01J1/304 ,  H01J35/06 ,  H01J35/10

Abstract: Disclosed is a field emission-type tomosynthesis system including a vacuum body having a space therein; a plurality of sources provided inside the body, wherein each of the sources emits a plurality of electrons; and a plurality of anodes disposed inside the body to face the sources and responsible for emitting a plurality of X-rays, wherein each of the anodes faces a corresponding source among the sources, and the electrons collide with each of the anodes to generate X-rays, wherein the X-ray emission angle of each of the anodes is capable of being independently adjusted so as to focus the X-rays emitted toward an object located outside the body. With this configuration, a plurality of X-rays is focused on an object and is emitted to the object to obtain information, and the information is synthesized, thereby improving the reliability of information about the object.

公开(公告)号：US20210407758A1

公开(公告)日：2021-12-30

申请号：US17353703

申请日：2021-06-21

Applicant: The Government of the United States of America, as represented by the Secretary of the Navy

Inventor： Kevin Jensen ,  Michael McDonald

IPC: H01J1/304

Abstract: A compound field emitter (CFE) includes a first surface possessing a field enhancement factor >1, and a second surface possessing one or both of a field enhancement factor >1, or a low work function, wherein the second surface is coated, formed or applied upon the first surface. The second surface has a characteristic size at least 3 times smaller than the first surface, and the outer surface includes a coating of calcium aluminate 12CaO-7Al2O3.