Invention Grant
- Patent Title: Light-receiving element and light-receiving element array
- Patent Title (中): 光接收元件和光接收元件阵列
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Application No.: US13061367Application Date: 2009-07-24
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Publication No.: US08188559B2Publication Date: 2012-05-29
- Inventor: Yasuhiro Iguchi , Kohei Miura , Hiroshi Inada , Youichi Nagai
- Applicant: Yasuhiro Iguchi , Kohei Miura , Hiroshi Inada , Youichi Nagai
- Applicant Address: JP Osaka
- Assignee: Sumitomo Electric Industries, Ltd.
- Current Assignee: Sumitomo Electric Industries, Ltd.
- Current Assignee Address: JP Osaka
- Agency: Fish & Richardson P.C.
- Priority: JP2008-334907 20081226
- International Application: PCT/JP2009/063248 WO 20090724
- International Announcement: WO2010/073768 WO 20100701
- Main IPC: H01L27/14
- IPC: H01L27/14 ; H01L31/00

Abstract:
Provided are a light-receiving element which has sensitivity in the near-infrared region and in which a good crystal quality is easily obtained, a one-dimensional or two-dimensional array of the light-receiving elements is easily formed with a high accuracy, and a dark current can be reduced; a light-receiving element array; and methods for producing the same.A light-receiving element includes a group III-V compound semiconductor stacked structure including an absorption layer 3 having a pn-junction 15 therein, wherein the absorption layer has a multiquantum well structure composed of group III-V compound semiconductors, the pn-junction 15 is formed by selectively diffusing an impurity element into the absorption layer, and the concentration of the impurity element in the absorption layer is 5×1016 cm−3 or less. A diffusion concentration distribution control layer 4 has an n-type impurity concentration of 2×1015/cm3 or less before the diffusion, the diffusion concentration distribution control layer having a portion adjacent to the absorption layer, the portion having a low impurity concentration.
Public/Granted literature
- US20110140082A1 LIGHT-RECEIVING ELEMENT AND LIGHT-RECEIVING ELEMENT ARRAY Public/Granted day:2011-06-16
Information query
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