Invention Grant
- Patent Title: Method for repairing pattern defect on electronic circuit and apparatus therefor
- Patent Title (中): 修复电子电路图案缺陷的方法及其设备
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Application No.: US12359405Application Date: 2009-01-26
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Publication No.: US08206775B2Publication Date: 2012-06-26
- Inventor: Nobuaki Nakasu , Tadao Edamura , Hirofumi Sunaoshi , Takemi Igeta , Kazuhiro Fukuchi
- Applicant: Nobuaki Nakasu , Tadao Edamura , Hirofumi Sunaoshi , Takemi Igeta , Kazuhiro Fukuchi
- Applicant Address: JP Chiba JP Hyogo-ken
- Assignee: Hitachi Displays, Ltd.,Panasonic Liquid Crystal Display Co., Ltd.
- Current Assignee: Hitachi Displays, Ltd.,Panasonic Liquid Crystal Display Co., Ltd.
- Current Assignee Address: JP Chiba JP Hyogo-ken
- Agency: Antonelli, Terry, Stout & Kraus, LLP.
- Priority: JP2008-020248 20080131
- Main IPC: C23C16/52
- IPC: C23C16/52 ; B05D5/12 ; B05D3/00 ; B28B19/00 ; G01R31/00 ; G01R31/08 ; H01H31/02 ; B05C11/00

Abstract:
The pattern defect repairing apparatus comprises an application head, a waste ejection board, a waste ejection vessel, a waste ejection board moving stage, a head lifting stage, and an application unit base. The application head comprises an ink-jet head and a head holder. An ink jet head has an ejection nozzle, and is attached to the head holder and able to be moved up and down by the head lifting stage. The waste ejection vessel is provided to the waste ejection board and able to be moved between a waste ejection position and a retreated position by the waste ejection board moving stage. Repairing material is ejected for waste onto the waste ejection board set in the vicinity of the nozzle immediately before application to repair the defect. The tip end of the nozzle is prevented from being dried.
Public/Granted literature
- US20090196978A1 METHOD FOR REPAIRING PATTERN DEFECT ON ELECTRONIC CIRCUIT AND APPARATUS THEREFOR Public/Granted day:2009-08-06
Information query
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