Invention Grant
- Patent Title: Scanning electron microscope and method of imaging an object by using the scanning electron microscope
- Patent Title (中): 扫描电子显微镜和使用扫描电子显微镜成像物体的方法
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Application No.: US12984907Application Date: 2011-01-05
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Publication No.: US08222601B2Publication Date: 2012-07-17
- Inventor: Ichiro Tachibana , Mitsugu Sato , Naomasa Suzuki
- Applicant: Ichiro Tachibana , Mitsugu Sato , Naomasa Suzuki
- Applicant Address: JP Tokyo
- Assignee: Hitachi High Technologies Corporation
- Current Assignee: Hitachi High Technologies Corporation
- Current Assignee Address: JP Tokyo
- Agency: McDermott Will & Emery LLP
- Priority: JP2007-160096 20070618
- Main IPC: H01J37/28
- IPC: H01J37/28 ; G01N23/225

Abstract:
A scanning electron microscope capable of modifying the focal position of a condenser lens with high speed and high reproducibility in order that low-magnification images are obtained at large depths of focus and that high-magnification images are obtained at high resolution. The microscope has a specimen-holding portion, an electron beam source, a condenser lens for converging the electron beam, an objective lens for focusing the converged beam into a very small spot onto a specimen, scan coils, a detector for detecting a specimen signal emanating from the specimen, and a display portion for displaying the detected specimen signal as an image. An axisymmetric electrode is disposed within the magnetic field produced by the condenser lens. A voltage is applied to the electrode.
Public/Granted literature
- US20110095184A1 SCANNING ELECTRON MICROSCOPE AND METHOD OF IMAGING AN OBJECT BY USING THE SCANNING ELECTRON MICROSCOPE Public/Granted day:2011-04-28
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