Invention Grant
US08222601B2 Scanning electron microscope and method of imaging an object by using the scanning electron microscope 有权
扫描电子显微镜和使用扫描电子显微镜成像物体的方法

Scanning electron microscope and method of imaging an object by using the scanning electron microscope
Abstract:
A scanning electron microscope capable of modifying the focal position of a condenser lens with high speed and high reproducibility in order that low-magnification images are obtained at large depths of focus and that high-magnification images are obtained at high resolution. The microscope has a specimen-holding portion, an electron beam source, a condenser lens for converging the electron beam, an objective lens for focusing the converged beam into a very small spot onto a specimen, scan coils, a detector for detecting a specimen signal emanating from the specimen, and a display portion for displaying the detected specimen signal as an image. An axisymmetric electrode is disposed within the magnetic field produced by the condenser lens. A voltage is applied to the electrode.
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