Invention Grant
- Patent Title: Method of improving ellipsometric and the like data
- Patent Title (中): 改进椭圆等数据的方法
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Application No.: US12586692Application Date: 2009-09-25
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Publication No.: US08223334B1Publication Date: 2012-07-17
- Inventor: Blaine D. Johs , Martin M. Liphardt
- Applicant: Blaine D. Johs , Martin M. Liphardt
- Applicant Address: US NE Lincoln
- Assignee: J.A. Woollam Co., Inc.
- Current Assignee: J.A. Woollam Co., Inc.
- Current Assignee Address: US NE Lincoln
- Agent James D. Welch
- Main IPC: G01J4/00
- IPC: G01J4/00
Abstract:
A system and method for improving data provided by ellipsometer, polarimeter and the like systems involving diminishing the effects of undesirable noise in the intensity of a beam of electromagnetic radiation caused by, for instance, random variations in intensity of a source provided beam of electromagnetic radiation and/or periodic or non-periodic variations in beam intensity resulting from wobble/wander of a moving sample, during investigation of the sample by the beam of electromagnetic radiation.
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