Invention Grant
US08268397B2 Organometallic precursor, thin film having the same, metal wiring including the thin film, method of forming a thin film and method of manufacturing a metal wiring using the same
有权
有机金属前体,具有该薄膜的薄膜,包含该薄膜的金属布线,形成薄膜的方法及使用其制造金属布线的方法
- Patent Title: Organometallic precursor, thin film having the same, metal wiring including the thin film, method of forming a thin film and method of manufacturing a metal wiring using the same
- Patent Title (中): 有机金属前体,具有该薄膜的薄膜,包含该薄膜的金属布线,形成薄膜的方法及使用其制造金属布线的方法
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Application No.: US12219983Application Date: 2008-07-31
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Publication No.: US08268397B2Publication Date: 2012-09-18
- Inventor: Youn-Joung Cho , Jung-Ho Lee , Jun-Hyun Cho , Seung-Min Ryu , Kyoo-Chul Cho , Jung-Sik Choi
- Applicant: Youn-Joung Cho , Jung-Ho Lee , Jun-Hyun Cho , Seung-Min Ryu , Kyoo-Chul Cho , Jung-Sik Choi
- Applicant Address: KR Gyeonggi-do
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Gyeonggi-do
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: KR10-2007-0078188 20070803
- Main IPC: B05D1/36
- IPC: B05D1/36 ; C23C16/00

Abstract:
Disclosed are an organometallic precursor that may be used in manufacturing a semiconductor device, a thin film having the same, a metal wiring including the thin film, a method of forming a thin film and a method of manufacturing a metal wiring. An organometallic precursor including a central metal, a borohydride ligand and an amine ligand for reducing a polarity of the organometallic precursor may be provided onto a substrate, and may be thermally decomposed to form a thin film on the substrate. The organometallic precursor having a reduced polarity may be provided to a chamber with a constant flow rate, and thus stability and/or efficiency of a semiconductor manufacturing process may be improved.
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