Invention Grant
US08268448B2 Assembly of silicon parts bonded together with a silicon and silica composite
有权
组装与硅和二氧化硅复合材料结合在一起的硅部件
- Patent Title: Assembly of silicon parts bonded together with a silicon and silica composite
- Patent Title (中): 组装与硅和二氧化硅复合材料结合在一起的硅部件
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Application No.: US12685542Application Date: 2010-01-11
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Publication No.: US08268448B2Publication Date: 2012-09-18
- Inventor: James E. Boyle , Raanan Zehavi , Amnon Chalzel
- Applicant: James E. Boyle , Raanan Zehavi , Amnon Chalzel
- Applicant Address: US CA Santa Clara
- Assignee: Ferrotec (USA) Corporation
- Current Assignee: Ferrotec (USA) Corporation
- Current Assignee Address: US CA Santa Clara
- Agency: Mesmer & Deleault, PLLC
- Main IPC: B05D3/02
- IPC: B05D3/02 ; B32B5/16 ; B32B9/00 ; B32B17/06 ; B32B9/04 ; B32B13/04 ; G11B11/105

Abstract:
A method of joining two silicon members, the adhesive used for the method, and the joined product, especially a silicon tower for supporting multiple silicon wafers. A flowable adhesive is prepared comprising silicon particles of size less than 100 μm and preferably less than 100 nm and a silica bridging agent, such as a spin-on glass. Nano-silicon crystallites of about 20 nm size maybe formed by CVD. Larger particles maybe milled from virgin polysilicon. If necessary, a retardant such as a heavy, preferably water-insoluble alcohol such as terpineol is added to slow setting of the adhesive at room temperature. The mixture is applied to the joining areas. The silicon parts are assembled and annealed at a temperature sufficient to link the silica, preferably at 900° C. to 1100° C. for nano-silicon but higher for milled silicon.
Public/Granted literature
- US20100119817A1 Assembly of silicon parts bonded together with a silicon and silica composite Public/Granted day:2010-05-13
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