Invention Grant
- Patent Title: Storage capacitor having an increased aperture ratio and method of manufacturing the same
- Patent Title (中): 具有增加的开口率的存储电容器及其制造方法
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Application No.: US12466675Application Date: 2009-05-15
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Publication No.: US08269310B2Publication Date: 2012-09-18
- Inventor: Chiu-Chuan Chen
- Applicant: Chiu-Chuan Chen
- Applicant Address: CN Long-Hua, Bao'an Shen-Zhen
- Assignee: Century Display (Shenzhen) Co., Ltd.
- Current Assignee: Century Display (Shenzhen) Co., Ltd.
- Current Assignee Address: CN Long-Hua, Bao'an Shen-Zhen
- Agency: Muncy, Geissler, Olds & Lowe, PLLC
- Priority: CN200910036561 20090109
- Main IPC: H01L21/02
- IPC: H01L21/02

Abstract:
Disclosed is a method of manufacturing a storage capacitor having increased aperture ratio: providing a substrate having a metal layer disposed thereon, and said metal layer is covered correspondingly with a first dielectric layer and a second dielectric layer in sequence; forming a photoresist layer with a uniform thickness to cover said second dielectric layer; performing a process of exposure-to-light and development to a portion of said photoresist layer that is correspondingly disposed over said metal layer sequentially, so that its thickness is less than its original thickness; removing said photoresist layer and etching said portion of said second dielectric layer, so that a thickness of said portion of said second dielectric layer is less than its original thickness, and the etching depth of said portion is greater than that of the other remaining portions of said second dielectric layer; and forming an electrode layer on said second dielectric layer.
Public/Granted literature
- US20100176485A1 STORAGE CAPACITOR HAVING AN INCREASED APERTURE RATIO AND METHOD OF MANUFACTURING THE SAME Public/Granted day:2010-07-15
Information query
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