Invention Grant
- Patent Title: White light scanning interferometer with simultaneous phase-shifting module
- Patent Title (中): 白光扫描干涉仪同时移相模块
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Application No.: US12778009Application Date: 2010-05-11
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Publication No.: US08269980B1Publication Date: 2012-09-18
- Inventor: Piotr Szwaykowski
- Applicant: Piotr Szwaykowski
- Applicant Address: US AZ Tucson
- Assignee: Engineering Synthesis Design, Inc.
- Current Assignee: Engineering Synthesis Design, Inc.
- Current Assignee Address: US AZ Tucson
- Agency: Hayes Soloway P.C.
- Main IPC: G01B11/02
- IPC: G01B11/02

Abstract:
A simultaneous phase-shifting white light scanning interferometer comprises a white light scanning interferometer, a simultaneous phase-shifting module, and a scanner. Light from a short coherence length light source may be polarized and then split, by a polarization type beam-splitter, into orthogonally polarized reference and test beams. The simultaneous phase-shifting module comprises a plurality of detectors, allows for controlled phase shifts between the reference and test beams, and creates at least three independent interferograms, each with different phase shifts between the reference and test beams. The scanner translates the simultaneous phase-shifting module with respect to an object under measurement.
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