Invention Grant
US08286579B2 Mask assembly for thin film vapor deposition of flat panel display
有权
用于平板显示器薄膜气相沉积的掩模组件
- Patent Title: Mask assembly for thin film vapor deposition of flat panel display
- Patent Title (中): 用于平板显示器薄膜气相沉积的掩模组件
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Application No.: US12196445Application Date: 2008-08-22
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Publication No.: US08286579B2Publication Date: 2012-10-16
- Inventor: Dong-Young Sung , Hwa-Jeong Kim
- Applicant: Dong-Young Sung , Hwa-Jeong Kim
- Applicant Address: KR Yongin, Gyeonggi-do
- Assignee: Samsung Display Co., Ltd
- Current Assignee: Samsung Display Co., Ltd
- Current Assignee Address: KR Yongin, Gyeonggi-do
- Agency: Knobbe, Martens, Olson & Bear LLP
- Priority: KR10-2007-0120267 20071123
- Main IPC: B05C1/00
- IPC: B05C1/00 ; B05C5/00 ; B05C11/11 ; B05B15/04 ; C23C16/00

Abstract:
A mask assembly for thin film vapor deposition of a flat panel display is disclosed. In the mask assembly, a cleansing solution remaining in the gap between a unit mask and a frame after cleansing the mask assembly may be minimized. The mask assembly includes a frame and a plurality of unit masks. The frame includes a pair of first supporting portions and a pair of second supporting portions that surround an opening. The plurality of unit masks have at least one set of pattern openings, and the unit masks are fixed on the first supporting portion while having a tensile force applied thereto. The first supporting portion includes a first surface and a second surface. The unit masks are fixed on the first surface, and the second surface has a height difference to the first surface along a thickness direction of the unit masks from the first surface.
Public/Granted literature
- US20090137180A1 MASK ASSEMBLY FOR THIN FILM VAPOR DEPOSITION OF FLAT PANEL DISPLAY Public/Granted day:2009-05-28
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