Invention Grant
US08288817B2 Semiconductor constructions for transistor gates and NAND cell units
有权
晶体管栅极和NAND单元的半导体结构
- Patent Title: Semiconductor constructions for transistor gates and NAND cell units
- Patent Title (中): 晶体管栅极和NAND单元的半导体结构
-
Application No.: US12986487Application Date: 2011-01-07
-
Publication No.: US08288817B2Publication Date: 2012-10-16
- Inventor: Yongjun Jeff Hu
- Applicant: Yongjun Jeff Hu
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: Wells St. John P.S.
- Main IPC: H01L29/792
- IPC: H01L29/792

Abstract:
Some embodiments include methods of forming charge storage transistor gates and standard FET gates in which common processing is utilized for fabrication of at least some portions of the different types of gates. FET and charge storage transistor gate stacks may be formed. The gate stacks may each include a gate material, an insulative material, and a sacrificial material. The sacrificial material is removed from the FET and charge storage transistor gate stacks. The insulative material of the FET gate stacks is etched through. A conductive material is formed over the FET gate stacks and over the charge storage transistor gate stacks. The conductive material physically contacts the gate material of the FET gate stacks, and is separated from the gate material of the charge storage transistor gate stacks by the insulative material remaining in the charge storage transistor gate stacks. Some embodiments include gate structures.
Public/Granted literature
- US20110095357A1 Semiconductor Constructions, Methods Of Forming Transistor Gates, And Methods Of Forming NAND Cell Units Public/Granted day:2011-04-28
Information query
IPC分类: