Invention Grant
US08296091B2 System and process for calibrating pyrometers in thermal processing chambers
有权
用于在热处理室中校准高温计的系统和过程
- Patent Title: System and process for calibrating pyrometers in thermal processing chambers
- Patent Title (中): 用于在热处理室中校准高温计的系统和过程
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Application No.: US13109577Application Date: 2011-05-17
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Publication No.: US08296091B2Publication Date: 2012-10-23
- Inventor: Paul Janis Timans
- Applicant: Paul Janis Timans
- Applicant Address: US CA Fremont
- Assignee: Mattson Technology, Inc.
- Current Assignee: Mattson Technology, Inc.
- Current Assignee Address: US CA Fremont
- Agency: Dority & Manning, P.A.
- Main IPC: G01J5/02
- IPC: G01J5/02
Abstract:
A method and system for calibrating temperature measurement devices, such as pyrometers, in thermal processing chambers are disclosed. According to the present invention, the system includes a calibrating light source that emits light energy onto a substrate contained in the thermal processing chamber. A light detector then detects the amount of light that is being transmitted through the substrate. The amount of detected light energy is then used to calibrate a temperature measurement device that is used in the system.
Public/Granted literature
- US20110216803A1 SYSTEM AND PROCESS FOR CALIBRATING PYROMETERS IN THERMAL PROCESSING CHAMBERS Public/Granted day:2011-09-08
Information query
