Invention Grant
US08345512B2 Capacitive micromachined ultrasonic transducer (cMUT) device and method of controlling the same
有权
电容式微加工超声波换能器（cMUT）装置及其控制方法
- Patent Title: Capacitive micromachined ultrasonic transducer (cMUT) device and method of controlling the same
- Patent Title (中): 电容式微加工超声波换能器（cMUT）装置及其控制方法
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Application No.: US12062240Application Date: 2008-04-03
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Publication No.: US08345512B2Publication Date: 2013-01-01
- Inventor: Hideo Adachi , Katsuhiro Wakabayashi , Kosei Tamiya , Masaaki Amikura , Kazuya Matsumoto , Ryo Ohta , Mamoru Hasegawa , Hiroshi Ito
- Applicant: Hideo Adachi , Katsuhiro Wakabayashi , Kosei Tamiya , Masaaki Amikura , Kazuya Matsumoto , Ryo Ohta , Mamoru Hasegawa , Hiroshi Ito
- Applicant Address: JP Tokyo JP Tokyo
- Assignee: Olympus Medical Systems Corp.,Olympus Corporation
- Current Assignee: Olympus Medical Systems Corp.,Olympus Corporation
- Current Assignee Address: JP Tokyo JP Tokyo
- Agency: Scully, Scott, Murphy & Presser, P.C.
- Priority: JP2005-289823 20051003
- Main IPC: A61B8/00
- IPC: A61B8/00 ; B06B1/02 ; H01L41/09
Abstract:
A capacitive micromachined ultrasonic transducer (cMUT) device, comprising: a cMUT formed on a semiconductor substrate; a DC high-voltage generation unit that is provided on the semiconductor substrate and that is for generating a DC high-voltage signal to be superposed on a driving signal for the cMUT; a driving signal generation unit that is provided on the semiconductor substrate and that is for generating the driving signal; and a superposition unit that is provided on the semiconductor substrate and that is for branching the DC high-voltage signal output from the DC high-voltage generation unit and for superposing one of the branched DC high-voltage signals on the other of the branched DC high-voltage signals via the driving signal generation unit.
Public/Granted literature
- US20080269614A1 CAPACITIVE MICROMACHINED ULTRASONIC TRANSDUCER (cMUT) DEVICE AND METHOD OF CONTROLLING THE SAME Public/Granted day:2008-10-30
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