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1.发明申请ULTRASONIC TRANSDUCER, ULTRASONIC TRANSDUCER FABRICATION METHOD, AND ULTRASONIC ENDOSCOPE 有权超声波传感器，超声波传感器制造方法和超声内镜公开(公告)号：US20110036808A1
公开(公告)日：2011-02-17
申请号：US12914651
申请日：2010-10-28
Applicant: Kazuya MATSUMOTO , Ryo OHTA , Mamoru HASEGAWA , Hideo ADACHI , Katsuhiro WAKABAYASHI
Inventor： Kazuya MATSUMOTO , Ryo OHTA , Mamoru HASEGAWA , Hideo ADACHI , Katsuhiro WAKABAYASHI
IPC: H04R31/00
CPC classification number: A61B8/4488 , A61B8/12 , A61B8/445 , B06B1/0292 , Y10T29/42 , Y10T29/49005 , Y10T29/49155
Abstract: An ultrasonic transducer according to the present invention includes: two or more ultrasonic transducer cells, each of which has a lower electrode, a first insulating layer placed on the lower electrode, a cavity placed on the first insulating layer, a second insulating layer placed on the cavity, and an upper electrode placed above the second insulating layer; channels which communicate the cavities with each other; the second insulating layer placed on the channels; holes formed in the second insulating layer placed on the channels; and sealing portions which seal the holes, where that part of the sealing portions which enters the channels is the same in cross-sectional shape as the holes.
Abstract translation: 根据本发明的超声波换能器包括：两个或更多个超声波换能器单元，每个超声换能器单元具有下电极，设置在下电极上的第一绝缘层，放置在第一绝缘层上的空腔，放置在第二绝缘层上的第二绝缘层 所述空腔和位于所述第二绝缘层上方的上电极; 将空腔相互通信的通道; 第二绝缘层放置在通道上; 形成在通道上的第二绝缘层中的孔; 以及密封孔的密封部分，其中进入通道的密封部分的那部分与孔的横截面形状相同。
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2.发明申请CAPACITIVE MICROMACHINED ULTRASONIC TRANSDUCER (cMUT) DEVICE AND METHOD OF CONTROLLING THE SAME 有权电容式微型超声波传感器（cMUT）装置及其控制方法公开(公告)号：US20080269614A1
公开(公告)日：2008-10-30
申请号：US12062240
申请日：2008-04-03
Applicant: Hideo ADACHI , Katsuhiro WAKABAYASHI , Kosei TAMIYA , Masaaki AMIKURA , Kazuya MATSUMOTO , Ryo OHTA , Mamoru HASEGAWA , Hiroshi ITO
Inventor： Hideo ADACHI , Katsuhiro WAKABAYASHI , Kosei TAMIYA , Masaaki AMIKURA , Kazuya MATSUMOTO , Ryo OHTA , Mamoru HASEGAWA , Hiroshi ITO
CPC classification number: A61B8/00 , A61B8/12 , B06B1/0207 , B06B1/0292 , B06B2201/51 , G01N29/2406
Abstract: A capacitive micromachined ultrasonic transducer (cMUT) device, comprising: a cMUT formed on a semiconductor substrate; a DC high-voltage generation unit that is provided on the semiconductor substrate and that is for generating a DC high-voltage signal to be superposed on a driving signal for the cMUT; a driving signal generation unit that is provided on the semiconductor substrate and that is for generating the driving signal; and a superposition unit that is provided on the semiconductor substrate and that is for branching the DC high-voltage signal output from the DC high-voltage generation unit and for superposing one of the branched DC high-voltage signals on the other of the branched DC high-voltage signals via the driving signal generation unit.
Abstract translation: 一种电容微加工超声波换能器（cMUT）装置，包括：形成在半导体衬底上的cMUT; DC高电压产生单元，设置在半导体基板上，用于产生叠加在cMUT的驱动信号上的DC高电压信号; 驱动信号生成单元，其设置在所述半导体基板上，用于产生所述驱动信号; 以及叠加单元，其设置在所述半导体基板上，并且用于分支从所述直流高压发生单元输出的所述直流高电压信号，并且用于将所述分支直流高电压信号中的一个叠加在所述分支DC 通过驱动信号发生单元的高电压信号。
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3.发明申请Ultrasonic transducer, method for manufacturing ultrasonic transducer, and ultrasonic endoscope 有权超声波换能器，超声波换能器制造方法及超声波内窥镜公开(公告)号：US20080200811A1
公开(公告)日：2008-08-21
申请号：US11977191
申请日：2007-10-24
Applicant: Katsuhiro Wakabayashi , Hideo Adachi , Mamoru Hasegawa , Kazuya Matsumoto , Ryo Ohta
Inventor： Katsuhiro Wakabayashi , Hideo Adachi , Mamoru Hasegawa , Kazuya Matsumoto , Ryo Ohta
CPC classification number: A61B8/4488 , A61B8/12 , A61B8/445 , A61B8/4483 , A61B2562/028 , B06B1/0292
Abstract: An ultrasonic transducer according to the invention includes a flexible sheet, a rigid body portion including a lower electrode made of at least a thin-film conductive material on a surface of the flexible sheet, a dividing portion which divides the rigid body portion into segments, and a plurality of transducer elements including the divided rigid body portion, has at least one transducer cell composed of one of the segments, an insulating partition portion bonded to the segment, an air gap portion surrounded by the partition portion, an upper electrode opposed to the lower electrode extending to the partition portion to sandwich the air gap portion therebetween, and an upper insulating layer formed on the upper electrode, and includes an upper protection film which continuously covers a surface portion of the transducer elements and the dividing portion.
Abstract translation: 根据本发明的超声波换能器包括柔性片，刚性体部分，其包括在柔性片的表面上由至少薄膜导电材料制成的下电极，将刚体部分分割成段的分割部分， 并且包括分割刚体部的多个换能器元件具有至少一个由一个片段组成的换能器单元，与该片段接合的绝缘隔板部分，被该分隔部包围的气隙部分， 所述下电极延伸到所述分隔部分以夹住所述气隙部分，以及形成在所述上电极上的上绝缘层，并且包括连续覆盖所述换能器元件的表面部分和所述分割部分的上保护膜。
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4.发明申请Ultrasonic transducer, ultrasonic probe, and ultrasonic diagnostic apparatus 审中-公开超声波换能器，超声波探头和超声波诊断仪公开(公告)号：US20080089180A1
公开(公告)日：2008-04-17
申请号：US11973945
申请日：2007-10-11
Applicant: Kazuya Matsumoto , Mamoru Hasegawa , Ryo Ohta , Hideo Adachi , Katsuhiro Wakabayashi
Inventor： Kazuya Matsumoto , Mamoru Hasegawa , Ryo Ohta , Hideo Adachi , Katsuhiro Wakabayashi
CPC classification number: B06B1/0292 , A61B8/12 , A61B8/445 , A61B8/4461 , A61B8/4488
Abstract: An ultrasonic transducer of a capacitance type includes a pair of electrodes disposed to be opposed to each other and a vibration film including one of the pair of electrodes. The ultrasonic transducer includes n (n is a natural number equal to or larger than 1) air gap layers interposed between the pair of electrodes and m (m is a natural number equal to or larger than 1) insulating layers interposed between the pair of electrodes. In the ultrasonic transducer, a following Formula (1) is satisfied: d1≦{Σdn+Σ(tm/Km)}/3 (1) where, dn indicates a thickness of an nth air gap layer, d1 indicates a thickness of an air gap layer for allowing the vibration film to vibrate, tm indicates a thickness of an mth insulating layer, and Km indicates a dielectric constant of the mth insulating layer.
Abstract translation: 电容式的超声波换能器包括彼此相对设置的一对电极和包括一对电极之一的振动膜。 超声波换能器包括介于一对电极之间的n（n为1以上的自然数）气隙层，m（m为1以上的自然数）绝缘层插入在该一对电极之间 。 在超声波换能器中，满足以下公式（1）：<？in-line-formula description =“In-line Formulas”end =“lead”？> d <1 <= {SigmaD < ＆lt;＆lt;＆lt;＆lt;＆lt; n＆gt; +＆Sigma;＆Sigma;＆Sigma; m＆CenterDot;（3） “end =”tail“？>其中，d
表示第n个气隙层的厚度，d <1>表示用于允许振动的气隙层的厚度 薄膜振动，t m表示第m绝缘层的厚度，K m表示第m绝缘层的介电常数。 -
5.发明申请ULTRASONIC TRANSDUCER, MANUFACTURING METHOD OF ULTRASONIC TRANSDUCER, AND ULTRASONIC ENDOSCOPE 有权超声波传感器，超声波传感器的制造方法和超声内镜公开(公告)号：US20080089179A1
公开(公告)日：2008-04-17
申请号：US11870786
申请日：2007-10-11
Applicant: Kazuya MATSUMOTO , Ryo OHTA , Mamoru HASEGAWA , Hideo ADACHI , Katsuhiro WAKABAYASHI
Inventor： Kazuya MATSUMOTO , Ryo OHTA , Mamoru HASEGAWA , Hideo ADACHI , Katsuhiro WAKABAYASHI
CPC classification number: A61B8/4488 , A61B8/12 , A61B8/445 , B06B1/0292 , Y10T29/42 , Y10T29/49005 , Y10T29/49155
Abstract: An ultrasonic transducer according to the present invention includes: two or more ultrasonic transducer cells, each of which has a lower electrode, a first insulating layer placed on the lower electrode, a cavity placed on the first insulating layer, a second insulating layer placed on the cavity, and an upper electrode placed above the second insulating layer; channels which communicate the cavities with each other; the second insulating layer placed on the channels; holes formed in the second insulating layer placed on the channels; and sealing portions which seal the holes, where that part of the sealing portions which enters the channels is the same in cross-sectional shape as the holes.
Abstract translation: 根据本发明的超声波换能器包括：两个或更多个超声波换能器单元，每个超声波换能器单元具有下电极，位于下电极上的第一绝缘层，放置在第一绝缘层上的空腔，放置在第二绝缘层上的第二绝缘层 所述空腔和位于所述第二绝缘层上方的上电极; 将空腔相互通信的通道; 第二绝缘层放置在通道上; 形成在通道上的第二绝缘层中的孔; 以及密封孔的密封部分，其中进入通道的密封部分的那部分与孔的横截面形状相同。
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Patent Agency Ranking
6.发明授权Ultrasonic transducer, ultrasonic transducer fabrication method, and ultrasonic endoscope 有权超声波换能器，超声波换能器制造方法和超声波内窥镜公开(公告)号：US07952256B2
公开(公告)日：2011-05-31
申请号：US11870786
申请日：2007-10-11
Applicant: Kazuya Matsumoto , Ryo Ohta , Mamoru Hasegawa , Hideo Adachi , Katsuhiro Wakabayashi
Inventor： Kazuya Matsumoto , Ryo Ohta , Mamoru Hasegawa , Hideo Adachi , Katsuhiro Wakabayashi
IPC: H01L41/08
CPC classification number: A61B8/4488 , A61B8/12 , A61B8/445 , B06B1/0292 , Y10T29/42 , Y10T29/49005 , Y10T29/49155
Abstract: An ultrasonic transducer according to the present invention includes: two or more ultrasonic transducer cells, each of which has a lower electrode, a first insulating layer placed on the lower electrode, a cavity placed on the first insulating layer, a second insulating layer placed on the cavity, and an upper electrode placed above the second insulating layer; channels which communicate the cavities with each other; the second insulating layer placed on the channels; holes formed in the second insulating layer placed on the channels; and sealing portions which seal the holes, where that part of the sealing portions which enters the channels is the same in cross-sectional shape as the holes.
Abstract translation: 根据本发明的超声波换能器包括：两个或更多个超声波换能器单元，每个超声换能器单元具有下电极，设置在下电极上的第一绝缘层，放置在第一绝缘层上的空腔，放置在第二绝缘层上的第二绝缘层 所述空腔和位于所述第二绝缘层上方的上电极; 将空腔相互通信的通道; 第二绝缘层放置在通道上; 形成在通道上的第二绝缘层中的孔; 以及密封孔的密封部分，其中进入通道的密封部分的那部分与孔的横截面形状相同。
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7.发明授权Cantilever for a scanning probe microscope and a method of manufacturing the same 失效用于扫描探针显微镜的悬臂及其制造方法
公开(公告)号：US5272913A
公开(公告)日：1993-12-28
申请号：US724146
申请日：1991-07-01
Applicant: Akitoshi Toda , Kaoru Tadokoro , Yasuji Nagata , Etsuo Shinohara , Yoshimitsu Enomoto , Michio Takayama , Ryo Ohta
Inventor： Akitoshi Toda , Kaoru Tadokoro , Yasuji Nagata , Etsuo Shinohara , Yoshimitsu Enomoto , Michio Takayama , Ryo Ohta
IPC: G01B21/30 , B81C1/00 , G01B5/28 , G01N27/00 , G01N37/00 , G01Q60/16 , G01Q70/10 , G01Q70/16 , H01J37/28 , H01L21/302
CPC classification number: G01Q70/16 , B82Y35/00 , G01Q70/02 , G01Q70/10 , Y10S977/878 , Y10S977/879
Abstract: A cantilever for a scanning probe microscope comprises a lever section and a probe section disposed near the free end thereof. The probe section includes a conical distal end portion having a narrow point angle and a bulging proximal end portion continuous with the distal end portion. The cantilever is manufactured by utilizing a semiconductor process.
Abstract translation: 用于扫描探针显微镜的悬臂包括设置在其自由端附近的杆部和探针部。 探头部分包括具有窄点角度的锥形远端部分和与远端部分连续的凸出近端部分。 通过利用半导体工艺制造悬臂。
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公开(公告)号：US08381387B2
公开(公告)日：2013-02-26
申请号：US12914651
申请日：2010-10-28
Applicant: Kazuya Matsumoto , Ryo Ohta , Mamoru Hasegawa , Hideo Adachi , Katsuhiro Wakabayashi
Inventor： Kazuya Matsumoto , Ryo Ohta , Mamoru Hasegawa , Hideo Adachi , Katsuhiro Wakabayashi
CPC classification number: A61B8/4488 , A61B8/12 , A61B8/445 , B06B1/0292 , Y10T29/42 , Y10T29/49005 , Y10T29/49155
Abstract: An ultrasonic transducer fabrication method including: depositing a conductive material on an insulating layer, partially etching the conductive material to form lower electrodes; depositing an insulating material to cover the lower electrodes to form a first insulating layer and depositing a sacrificial material thereon, performing etching, to create cavities and a channel-shaped sacrificial layer to communicate the cavities; depositing an insulating material on the first insulating layer to form a second insulating layer; partially etching the second insulating layer to form holes; etching and removing the sacrificial layer through the holes to form the cavities and channels; depositing a conductive material on the second insulating layer to plug the holes and form a conductive film; partially etching the conductive film to form upper electrodes and sealing portions which plug the holes; and forming a protective film on the second insulating layer to cover the upper electrodes and the sealing portions.
Abstract translation: 一种超声换能器制造方法，包括：在绝缘层上沉积导电材料，部分地蚀刻导电材料以形成下电极; 沉积绝缘材料以覆盖下电极以形成第一绝缘层并在其上沉积牺牲材料，执行蚀刻以产生空腔和沟槽状牺牲层以连通空腔; 在所述第一绝缘层上沉积绝缘材料以形成第二绝缘层; 部分蚀刻第二绝缘层以形成孔; 通过孔蚀刻和去除牺牲层以形成空腔和通道; 在第二绝缘层上沉积导电材料以堵塞孔并形成导电膜; 部分地蚀刻导电膜以形成上电极和堵塞孔的密封部分; 以及在所述第二绝缘层上形成保护膜以覆盖所述上电极和所述密封部。
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9.发明授权Capacitive micromachined ultrasonic transducer (cMUT) device and method of controlling the same 有权电容式微加工超声波换能器（cMUT）装置及其控制方法公开(公告)号：US08345512B2
公开(公告)日：2013-01-01
申请号：US12062240
申请日：2008-04-03
Applicant: Hideo Adachi , Katsuhiro Wakabayashi , Kosei Tamiya , Masaaki Amikura , Kazuya Matsumoto , Ryo Ohta , Mamoru Hasegawa , Hiroshi Ito
Inventor： Hideo Adachi , Katsuhiro Wakabayashi , Kosei Tamiya , Masaaki Amikura , Kazuya Matsumoto , Ryo Ohta , Mamoru Hasegawa , Hiroshi Ito
CPC classification number: A61B8/00 , A61B8/12 , B06B1/0207 , B06B1/0292 , B06B2201/51 , G01N29/2406
Abstract: A capacitive micromachined ultrasonic transducer (cMUT) device, comprising: a cMUT formed on a semiconductor substrate; a DC high-voltage generation unit that is provided on the semiconductor substrate and that is for generating a DC high-voltage signal to be superposed on a driving signal for the cMUT; a driving signal generation unit that is provided on the semiconductor substrate and that is for generating the driving signal; and a superposition unit that is provided on the semiconductor substrate and that is for branching the DC high-voltage signal output from the DC high-voltage generation unit and for superposing one of the branched DC high-voltage signals on the other of the branched DC high-voltage signals via the driving signal generation unit.
Abstract translation: 一种电容微加工超声波换能器（cMUT）装置，包括：形成在半导体衬底上的cMUT; DC高电压产生单元，设置在半导体基板上，用于产生叠加在cMUT的驱动信号上的DC高电压信号; 驱动信号生成单元，其设置在所述半导体基板上，用于产生所述驱动信号; 以及叠加单元，其设置在所述半导体基板上，并且用于分支从所述直流高压发生单元输出的所述直流高电压信号，并且用于将所述分支直流高电压信号中的一个叠加在所述分支DC 通过驱动信号发生单元的高电压信号。
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公开(公告)号：US07940603B2
公开(公告)日：2011-05-10
申请号：US11870827
申请日：2007-10-11
Applicant: Hideo Adachi , Katsuhiro Wakabayashi , Shinji Yasunaga , Mamoru Hasegawa , Kazuya Matsumoto , Ryo Ohta
Inventor： Hideo Adachi , Katsuhiro Wakabayashi , Shinji Yasunaga , Mamoru Hasegawa , Kazuya Matsumoto , Ryo Ohta
IPC: H04R19/00
CPC classification number: B06B1/0292 , A61B8/12 , A61B8/445 , A61B8/4488
Abstract: An ultrasonic transducer cell according to the present invention includes: a substrate; a charge holding portion provided on the substrate; a lower electrode provided on the charge holding portion and used to input and output a signal; and a vibration membrane provided above the lower electrode to be separated from the lower electrode with a cavity, and configured to include at least an insulating film and an upper electrode provided on the insulating film.
Abstract translation: 根据本发明的超声波换能器单元包括：基板; 设置在所述基板上的电荷保持部; 设置在电荷保持部上并用于输入和输出信号的下电极; 以及设置在所述下部电极上方的振动膜，其与所述下部电极分离成具有空腔，并且被配置为至少包括绝缘膜和设置在所述绝缘膜上的上部电极。
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