Invention Grant
- Patent Title: System for naturally adjusting the cross-sectional area of a beam of electromagnetic radiation entered to a focusing means
- Patent Title (中): 用于自然调节输入到聚焦装置的电磁辐射束的横截面积的系统
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Application No.: US12661974Application Date: 2010-03-25
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Publication No.: US08351036B1Publication Date: 2013-01-08
- Inventor: Martin M. Liphardt
- Applicant: Martin M. Liphardt
- Applicant Address: US NE Lincoln
- Assignee: J. A. Woollam Co., Inc.
- Current Assignee: J. A. Woollam Co., Inc.
- Current Assignee Address: US NE Lincoln
- Agent James D. Welch
- Main IPC: G01J4/00
- IPC: G01J4/00
Abstract:
A combination of a focusing means, and a filtering means which naturally adjusts the cross-sectional area of a beam of electromagnetic radiation passed to the focusing means as a function of wavelength, optionally as an element of an ellipsometer or polarimeter system.
Information query
