Invention Grant
US08354009B2 Apparatus and method for manufacturing stress-free flexible printed circuit board
有权
用于制造无应力柔性印刷电路板的装置和方法
- Patent Title: Apparatus and method for manufacturing stress-free flexible printed circuit board
- Patent Title (中): 用于制造无应力柔性印刷电路板的装置和方法
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Application No.: US12034707Application Date: 2008-02-21
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Publication No.: US08354009B2Publication Date: 2013-01-15
- Inventor: Jeon Geon Han , Kab Seog Kim , Yong Mo Kim
- Applicant: Jeon Geon Han , Kab Seog Kim , Yong Mo Kim
- Applicant Address: KR Gyeonggi-do
- Assignee: Sungkyunkwan University Foundation for Corporate Collaboration
- Current Assignee: Sungkyunkwan University Foundation for Corporate Collaboration
- Current Assignee Address: KR Gyeonggi-do
- Agency: Quarles & Brady LLP
- Priority: KR10-2007-0017716 20070222
- Main IPC: C23C14/00
- IPC: C23C14/00

Abstract:
An apparatus and method for manufacturing a highly efficient flexible thin metal film-laminated strip by improves adhesiveness between a polyimide strip and a thin metal film, and removes stress from thin films laminated through magnetron sputtering, which is a dry deposition process. The stress-free flexible circuit board manufacturing method includes the steps of: a) depositing a seed layer on the substrate using the magnetron deposition source; b) depositing a compressive thin film using the single magnetron deposition source arranged next to the magnetron deposition source; c) depositing tensile thin film using the dual magnetron deposition source arranged next to the single magnetron deposition source; and d) repeating the steps b) and c) so as to sequentially and alternately deposit compressive thin films and tensile thin films thereby obtaining a thick film with a desired thickness.
Public/Granted literature
- US20080202919A1 Apparatus And Method For Manufacturing Stress-Free Flexible Printed Circuit Board Public/Granted day:2008-08-28
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