Invention Grant
- Patent Title: Optical beam spectrometer with movable lens
- Patent Title (中): 具有可移动镜头的光束光谱仪
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Application No.: US13286181Application Date: 2011-10-31
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Publication No.: US08373856B2Publication Date: 2013-02-12
- Inventor: Keith T. Carron , Mark Watson , Shane Buller
- Applicant: Keith T. Carron , Mark Watson , Shane Buller
- Applicant Address: US CA Santa Clara
- Assignee: Intevac, Inc.
- Current Assignee: Intevac, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Nixon Peabody LLP
- Agent Joseph Bach, Esq.
- Main IPC: G01J3/44
- IPC: G01J3/44
Abstract:
A spectroscopic system is described that provides at least one of focus of an excitation beam onto a sample, automatic focus of an optical system of the spectroscopic system for collecting a spectroscopic signal, and/or averaging of excitation intensity over a surface area of the sample.
Public/Granted literature
- US20120044487A1 OPTICAL BEAM SPECTROMETER WITH MOVABLE LENS Public/Granted day:2012-02-23
Information query
