Invention Grant
US08395078B2 Arc recovery with over-voltage protection for plasma-chamber power supplies
有权
用于等离子体室电源的过电压保护的电弧恢复
- Patent Title: Arc recovery with over-voltage protection for plasma-chamber power supplies
- Patent Title (中): 用于等离子体室电源的过电压保护的电弧恢复
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Application No.: US12631735Application Date: 2009-12-04
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Publication No.: US08395078B2Publication Date: 2013-03-12
- Inventor: Milan Ilic
- Applicant: Milan Ilic
- Applicant Address: US CO Fort Collins
- Assignee: Advanced Energy Industries, Inc
- Current Assignee: Advanced Energy Industries, Inc
- Current Assignee Address: US CO Fort Collins
- Agency: Neugeboren O'Dowd PC
- Main IPC: B23K9/06
- IPC: B23K9/06
Abstract:
A system and method for managing power delivered to a processing chamber is described. In one embodiment current is drawn away from the plasma processing chamber while initiating an application of power to the plasma processing chamber during an initial period of time, the amount of current being drawn away decreasing during the initial period of time so as to increase the amount of power applied to the plasma processing chamber during the initial period of time.
Public/Granted literature
- US20100140231A1 ARC RECOVERY WITH OVER-VOLTAGE PROTECTION FOR PLASMA-CHAMBER POWER SUPPLIES Public/Granted day:2010-06-10
Information query
IPC分类:
