Invention Grant
- Patent Title: Charged particle beam apparatus using an electrostatic lens gun
- Patent Title (中): 使用静电透镜枪的带电粒子束装置
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Application No.: US13058137Application Date: 2009-07-23
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Publication No.: US08399863B2Publication Date: 2013-03-19
- Inventor: Hiroyasu Kaga , Masashi Sasaki , Junzo Azuma
- Applicant: Hiroyasu Kaga , Masashi Sasaki , Junzo Azuma
- Applicant Address: JP Tokyo
- Assignee: Hitachi High-Technologies Corporation
- Current Assignee: Hitachi High-Technologies Corporation
- Current Assignee Address: JP Tokyo
- Agency: McDermott Will & Emery LLP
- Priority: JP2008-206388 20080808
- International Application: PCT/JP2009/063204 WO 20090723
- International Announcement: WO2010/016394 WO 20100211
- Main IPC: H01J27/26
- IPC: H01J27/26 ; H01J37/08
Abstract:
A charged particle gun includes: a charged particle source; a first extracting electrode arranged in such a manner that a distance between the charged particle source and the first extracting electrode is fixed; a second extracting electrode located on the side opposite to the charged particle source with respect to the first extracting electrode, the electrode being arranged in such a manner that a distance between the first extracting electrode and the second extracting electrode is adjustable; and an earth electrode located on the side opposite to the first extracting electrode with respect to the second extracting electrode, the electrode being arranged in such a manner that a distance between the second extracting electrode and the earth electrode is fixed; wherein the first extracting electrode is equal in potential to the second extracting electrode.
Public/Granted literature
- US20110186745A1 CHARGED PARTICLE GUN AND FOCUSED ION BEAM APPARATUS USING THE GUN Public/Granted day:2011-08-04
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