Invention Grant
- Patent Title: Method of fabricating a charge trapping non-volatile memory cell
- Patent Title (中): 制造电荷捕获非易失性存储单元的方法
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Application No.: US12985322Application Date: 2011-01-05
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Publication No.: US08409945B2Publication Date: 2013-04-02
- Inventor: Hung-Lin Shih , Tsan-Chi Chu
- Applicant: Hung-Lin Shih , Tsan-Chi Chu
- Applicant Address: TW Science-Based Industrial Park, Hsin-Chu
- Assignee: United Microelectronics Corp.
- Current Assignee: United Microelectronics Corp.
- Current Assignee Address: TW Science-Based Industrial Park, Hsin-Chu
- Agent Winston Hsu; Scott Margo
- Main IPC: H01L21/8234
- IPC: H01L21/8234 ; H01L21/8247

Abstract:
A method of fabricating a non-volatile memory cell is disclosed. The method includes the steps of: forming two separate charge trapping structures on a semiconductor substrate; forming first spacers on sidewalls of the two charge trapping structures; forming a gate dielectric layer on the substrate; forming a gate on the two charge trapping structures and the gate dielectric layer between the two charge trapping structures; and forming two doped regions in the substrate beside the gate.
Public/Granted literature
- US20110097866A1 NON-VOLATILE MEMORY CELL AND METHOD OF FABRICATING THE SAME Public/Granted day:2011-04-28
Information query
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