Invention Grant
US08410562B2 Methods, apparatuses, and systems for micromechanical gas chemical sensing capacitor
有权
微机械气体化学感应电容器的方法，装置和系统
- Patent Title: Methods, apparatuses, and systems for micromechanical gas chemical sensing capacitor
- Patent Title (中): 微机械气体化学感应电容器的方法，装置和系统
-
Application No.: US13010954Application Date: 2011-01-21
-
Publication No.: US08410562B2Publication Date: 2013-04-02
- Inventor: Nathan Lazarus , Gary Fedder , Sarah Bedair , Chiung Lo
- Applicant: Nathan Lazarus , Gary Fedder , Sarah Bedair , Chiung Lo
- Applicant Address: US PA Pittsburgh
- Assignee: Carnegie Mellon University
- Current Assignee: Carnegie Mellon University
- Current Assignee Address: US PA Pittsburgh
- Agency: The Web Law Firm
- Main IPC: H01L27/14
- IPC: H01L27/14
Abstract:
A capacitive chemical sensor, along with methods of making and using the sensor are provided. The sensors described herein eliminate undesirable capacitance by etching away the substrate underneath the capacitive chemical sensor, eliminating most of the substrate capacitance and making changes in the chemical-sensitive layer capacitance easier to detect.
Public/Granted literature
- US20110180884A1 METHODS, APPARATUSES, AND SYSTEMS FOR MICROMECHANICAL GAS CHEMICAL SENSING CAPACITOR Public/Granted day:2011-07-28
Information query
IPC分类:
